JPS6293366U - - Google Patents
Info
- Publication number
- JPS6293366U JPS6293366U JP18622385U JP18622385U JPS6293366U JP S6293366 U JPS6293366 U JP S6293366U JP 18622385 U JP18622385 U JP 18622385U JP 18622385 U JP18622385 U JP 18622385U JP S6293366 U JPS6293366 U JP S6293366U
- Authority
- JP
- Japan
- Prior art keywords
- target
- shield
- covered
- ions
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002500 ions Chemical class 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18622385U JPH0342608Y2 (no) | 1985-12-02 | 1985-12-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18622385U JPH0342608Y2 (no) | 1985-12-02 | 1985-12-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6293366U true JPS6293366U (no) | 1987-06-15 |
JPH0342608Y2 JPH0342608Y2 (no) | 1991-09-06 |
Family
ID=31135583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18622385U Expired JPH0342608Y2 (no) | 1985-12-02 | 1985-12-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0342608Y2 (no) |
-
1985
- 1985-12-02 JP JP18622385U patent/JPH0342608Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0342608Y2 (no) | 1991-09-06 |