JPS62193659U - - Google Patents
Info
- Publication number
- JPS62193659U JPS62193659U JP8096986U JP8096986U JPS62193659U JP S62193659 U JPS62193659 U JP S62193659U JP 8096986 U JP8096986 U JP 8096986U JP 8096986 U JP8096986 U JP 8096986U JP S62193659 U JPS62193659 U JP S62193659U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- output side
- ion
- beam output
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 150000002500 ions Chemical class 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8096986U JPS62193659U (no) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8096986U JPS62193659U (no) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193659U true JPS62193659U (no) | 1987-12-09 |
Family
ID=30932270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8096986U Pending JPS62193659U (no) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193659U (no) |
-
1986
- 1986-05-30 JP JP8096986U patent/JPS62193659U/ja active Pending