JPS6293088A - 電子ビ−ム偏向装置 - Google Patents

電子ビ−ム偏向装置

Info

Publication number
JPS6293088A
JPS6293088A JP22988885A JP22988885A JPS6293088A JP S6293088 A JPS6293088 A JP S6293088A JP 22988885 A JP22988885 A JP 22988885A JP 22988885 A JP22988885 A JP 22988885A JP S6293088 A JPS6293088 A JP S6293088A
Authority
JP
Japan
Prior art keywords
coordinate
axis
coordinate axis
electrical
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22988885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373392B2 (de
Inventor
Hiroshi Noguchi
野口　洋
Ichiro Takegawa
一郎 竹川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP22988885A priority Critical patent/JPS6293088A/ja
Publication of JPS6293088A publication Critical patent/JPS6293088A/ja
Publication of JPH0373392B2 publication Critical patent/JPH0373392B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP22988885A 1985-10-17 1985-10-17 電子ビ−ム偏向装置 Granted JPS6293088A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22988885A JPS6293088A (ja) 1985-10-17 1985-10-17 電子ビ−ム偏向装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22988885A JPS6293088A (ja) 1985-10-17 1985-10-17 電子ビ−ム偏向装置

Publications (2)

Publication Number Publication Date
JPS6293088A true JPS6293088A (ja) 1987-04-28
JPH0373392B2 JPH0373392B2 (de) 1991-11-21

Family

ID=16899285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22988885A Granted JPS6293088A (ja) 1985-10-17 1985-10-17 電子ビ−ム偏向装置

Country Status (1)

Country Link
JP (1) JPS6293088A (de)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5154050A (ja) * 1974-11-07 1976-05-12 Nippon Electric Co Kyokusenjoyosetsusentsuisekisochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5154050A (ja) * 1974-11-07 1976-05-12 Nippon Electric Co Kyokusenjoyosetsusentsuisekisochi

Also Published As

Publication number Publication date
JPH0373392B2 (de) 1991-11-21

Similar Documents

Publication Publication Date Title
JPH06103946A (ja) 可変軸スティグマトール
JPS6293088A (ja) 電子ビ−ム偏向装置
JP3632278B2 (ja) ロボット間座標変換行列設定方法および補正方法
CA1285621C (en) Beam position correction device
JPH047088B2 (de)
US3714501A (en) Linearity correction for magnetically deflectable cathode ray tubes
US9035550B2 (en) Method of axial alignment of charged particle beam and charged particle beam system
JPH0785828A (ja) 電子ビーム装置
JPS6249405A (ja) ロボツトの教示方法
JPH0316204Y2 (de)
JPH02102519A (ja) ビーム描画装置の位置補正装置
JPS63229412A (ja) 光路位置補正装置
JPS5921163B2 (ja) デンシビ−ムロコウソウチ
US3471703A (en) Photoelectric control means for the deflection of the electron beam in welding apparatus
JPS58114431A (ja) 電子ビ−ム露光装置
JPS5832864Y2 (ja) 荷電粒子線溶接装置
JPS62270291A (ja) レ−ザ加工機におけるリアルタイム制御装置
JPH04262882A (ja) 電子ビーム加工機のビームアライメント調整方法
JPS62242201A (ja) 産業用ロボツトの制御方法
JPH01276546A (ja) フォーカスマグネット
JPH0715651A (ja) 電動旋回台システム
JPS62124082A (ja) 電子ビ−ム加工機
JPH02236936A (ja) 荷電ビーム装置
JP2658029B2 (ja) コンバーゼンス補正装置
JP2005528825A (ja) 陰極線管用の補助コイルドライバ回路