JPS629269A - Liquid tank for ultrasonic inspection - Google Patents

Liquid tank for ultrasonic inspection

Info

Publication number
JPS629269A
JPS629269A JP14838085A JP14838085A JPS629269A JP S629269 A JPS629269 A JP S629269A JP 14838085 A JP14838085 A JP 14838085A JP 14838085 A JP14838085 A JP 14838085A JP S629269 A JPS629269 A JP S629269A
Authority
JP
Japan
Prior art keywords
liquid
liquid tank
film
face
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14838085A
Other languages
Japanese (ja)
Inventor
Yoshio Tanito
谷東 芳雄
Yasuo Hayakawa
泰夫 早川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP14838085A priority Critical patent/JPS629269A/en
Publication of JPS629269A publication Critical patent/JPS629269A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE:To enable the flaw detectionof good accuracy by forming the bottom face of a liquid with the film fixing its periphery of the outer periphery of the liquid tank in the state having the value approximate to the sound inpedance of the liquid inside the liquid tank and having the slack deformable in an optional uneven shape. CONSTITUTION:The bottom face of a liquid tank A is formed by a film 2, for which those which are in extremely thin film thickness, several mu- scores mu, for instance, are used, although it varies according to the size of the liquid tank A and the shape of the flaw detection face of the body 4 to be inspected with which the external face of the film 2 comes in contact. The periphery of the film 2 is fixed to the circumference of the liquid tank A so as to leak no liquid 3 inside the liquid tank A, but in such case, the film 2 is fixed with a slack so that it can be closely fitted by deforming in the optional uneven face shape of the flaw detecting face of the body 4 to be inspected. For the material of the film 2 that which has the same or approximate value as or to the sound impedance of the liquid 3 and yet the strength to bear the tare weight of the liquid 3 in the film thickness is used. And in the liquid tank A an ulrasonic wave is emitted on the flaw detecting face of the body 4 to be inspected which is set outside the liquid tank A by the probe 5 dipped inside the liquid 3 and is received to the probe 5 almost as it is and the flaw detection can be performed with good accuracy.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は超音波を利用して被検体を探傷する場合に使用
される液槽に関する。゛ 〔発明の背景] 超音波を利用して工業製品、工業材料の欠陥を探傷する
方法°には各種の方法があるが、被検体の種類、形状9
寸法1表面あらさのほか欠陥の推定位置9寸法、形状9
種類等によりそれぞれ使い分けられている。各種探傷方
法のうちもっとも広く使われているのはパルス反射法で
あるが1本方法は直接接触法と液浸法に分類されいずれ
の方法も特徴を有し古くから普及している。直接接触法
は被検体の探傷面に油などの接触媒質を介して直接探触
子を当接して探傷する方法で、きわめて容易にかつリア
ルタイムに探傷できる大きな利点を有するが、探傷面の
あらさおよび接触媒質の厚さ。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a liquid tank used when testing a specimen using ultrasonic waves. [Background of the Invention] There are various methods for detecting defects in industrial products and materials using ultrasonic waves.
Dimensions 1 Surface roughness, estimated defect position 9 Dimensions, shape 9
They are used differently depending on the type. Among the various flaw detection methods, the most widely used is the pulse reflection method, but these methods are classified into the direct contact method and the immersion method, and each method has its own characteristics and has been popular for a long time. The direct contact method is a method in which flaws are detected by directly contacting the probe to the test surface of the test object through a couplant such as oil, and has the great advantage of being extremely easy to detect flaws in real time. Couplant thickness.

種類等により超音波の送受の能率が変動し、反射波の波
形が変動するなどの影響を受けるだけでなく、探触子の
当接の仕方によっても前記影響を受ける。このためかか
る場合には精度のよい探傷を要求しないか、精度を要求
する場合には探傷面を加工してあらさを減することが必
要となる。直接接触法のこのような短所を解消する方法
として液浸法(通常は液体に水が使用されるのでほとん
ど水浸法)が使用される。液浸法は被検体および探触子
を液中に浸漬する一般的な方法のほか、被検体の被検箇
所と探触子との間だけを局部的に液で満たす局部液浸法
があり、被検体および探触子を浸漬する液は水のほか油
、フレオン、トリクレン。
Not only is the efficiency of transmitting and receiving ultrasonic waves fluctuating depending on the type, and the waveform of the reflected wave is fluctuating, but the method of abutting the probe also has the above-mentioned effects. Therefore, in such cases, it is necessary not to require highly accurate flaw detection, or if high accuracy is required, it is necessary to process the flaw detection surface to reduce roughness. A liquid immersion method (usually called a water immersion method because water is usually used as the liquid) is used to overcome these disadvantages of the direct contact method. In addition to the general immersion method, in which the subject and probe are immersed in liquid, there is also a local immersion method, in which only the area between the test part of the subject and the probe is locally filled with liquid. In addition to water, the liquid used to immerse the specimen and probe is oil, freon, or trichlene.

メタノール等が使用される。液浸法においては被検体と
探触子が直接接触しないから超音波の送受が安定して行
われ、前記直接接触法における不具合点が解消され自動
探傷の目的にも広く用いられている。
Methanol etc. are used. In the liquid immersion method, since there is no direct contact between the specimen and the probe, ultrasonic waves can be transmitted and received stably, and the drawbacks of the direct contact method have been solved, and the method is widely used for automatic flaw detection.

しかし被検体には電子部品や精密機械部品などのように
液の侵入2発錆、汚染などを防止しなければならない種
類のものも数多くあり、これらの被検体に対しては通常
使用されている水浸法は。
However, there are many types of objects to be tested, such as electronic parts and precision mechanical parts, that must be protected against liquid intrusion, rust, contamination, etc. The water immersion method.

探傷後に被検体に対する前記悪影響を除去する処理が必
要になりそのまま使用できない不具合点がある。このた
め水浸法による前記不具合点を排除する液浸法として液
体にプレオンやトリクレンを使用する方法も一部実用に
供されているが、これらの液体は被検体に発錆や汚染な
どの悪影響は与えないものの、該液体内における超音波
の減衰が大きくそれだけ探傷の精度が低下し実用上の大
きな問題点を有する。
There is a drawback that it is necessary to remove the adverse effects on the object after the flaw detection, so that it cannot be used as is. For this reason, some liquid immersion methods that use preon or trichlene as liquids have been put into practical use to eliminate the above-mentioned disadvantages of the water immersion method, but these liquids have negative effects such as rusting and contamination on the specimen. However, the attenuation of the ultrasonic waves in the liquid is large and the accuracy of flaw detection is reduced accordingly, which poses a major practical problem.

〔発明の目的〕[Purpose of the invention]

本発明は上記従来技術の°問題点を解消し、被検体の種
類、形状9寸法9表面あらさ等により影響を受けること
なく、かつ被検体に液の侵入2発錆。
The present invention solves the above-mentioned problems of the conventional technology, and is not affected by the type, shape, dimensions, surface roughness, etc. of the specimen, and prevents liquid from entering the specimen and causing rust.

汚染などの悪影響を与えることなく、容易に精度よく、
しかもリアルタイムに探傷することができる超音波検査
用の液槽を提供することを目的とする。
easily and accurately without any negative effects such as contamination.
Moreover, it is an object of the present invention to provide a liquid tank for ultrasonic inspection that can perform flaw detection in real time.

〔発明の概要〕[Summary of the invention]

本発明は超音波検査用の液槽において、液槽の底面が、
液槽内の液体の音響インピーダンスと同一ないし近似す
る値を有し、かつ任意の凹凸面形状に変形可能に、たる
みを有する状態で周辺を液槽外周に固着した膜で形成さ
れることにより、液槽の底面を液槽外に設置された被検
体の探傷面に当接して探傷することを可能にし、被検体
の種類。
The present invention provides a liquid tank for ultrasonic inspection in which the bottom surface of the liquid tank is
It has a value that is the same as or approximates the acoustic impedance of the liquid in the liquid tank, and is formed of a membrane that is fixed to the outer periphery of the liquid tank in a sagging state so that it can be deformed into any uneven surface shape. It is possible to detect flaws by touching the bottom of the liquid tank to the flaw detection surface of a test object placed outside the tank, depending on the type of test object.

形状9寸法等に影響を受けることなく、かつ被検体に発
錆などの悪影響を与えることなく、容易に精度よくしか
もリアルタイムに探傷することができる超音波検査用の
液槽である。
This is a liquid tank for ultrasonic testing that allows flaw detection to be performed easily, accurately, and in real time without being affected by shape, dimensions, etc., and without having any adverse effects such as rust on the test object.

〔発明の実施例〕[Embodiments of the invention]

本発明の1実施例を図面により説明する。1は液槽Aの
周壁で、その形状および寸法は被検体4および探触子5
の種類、形状7寸法等により任意に決められる。液槽A
の底面は膜2で形成される。
An embodiment of the present invention will be described with reference to the drawings. 1 is the peripheral wall of the liquid tank A, and its shape and dimensions are similar to that of the object 4 and the probe 5.
It can be arbitrarily determined depending on the type, shape, dimensions, etc. Liquid tank A
The bottom surface of is formed by membrane 2.

[2は液槽Aの寸法や膜2の外面が当接される被検体4
の探傷面の形状および表面あらさにより異なるが、非常
に薄い膜厚例えば数ミクロンから数十ミクロンのものが
使用される。液槽Aの寸法が大きい場合は液槽A内の液
3の自重が大きくその自重を支えるための強度を必要と
するため、膜厚は比較的厚い数十ミクロンないしO,l
au程度までのものになり、反対に液槽Aの寸法が小さ
い場合は強度上膜厚は薄くてよい。一方被検体4の探傷
面の形状の凹凸が大きい場合や隅角部の探傷、あるいは
表面あらさがあらい場合は、膜厚が比較的厚い数十ミク
ロンないし0.1am程度まででもその探傷面の形状に
なじみ密着しやすいが、表面あらさが小さい場合には膜
厚を薄くした方があらさになじみ密着しやすくなる。膜
2は液槽A内の液3が漏出しないように周辺が液槽Aの
周囲に固着されるが、その除膜2が被検体4の探傷面の
任意の凹凸面形状に変形して密着できるようにたるみを
もたせて固着される。したがって液槽A内に液3を入れ
た状態では膜2はたるみ分だけ下方に膨らんでおり、そ
の状態で被検体4の探傷面を膨らんだ膜2の外面から上
方に突き上げるようにして当接させるか、または液槽A
の外側に設置されている被検体4の探傷面上にゆるやか
に降下させて当接すると1図に示すように探傷面に密着
した状態となる。−膜2を液槽Aに固着する構成として
図に示すように周壁1の下端にフランジlaを設け、フ
ランジlaの下側に液槽Aの高さを調節するアジャスタ
6を設けた台7との間に膜2の周辺を挟着する場合を示
したが、周壁1の内周または外周に取り付ける構成とし
てもよい。前記した膜2のたるみ量は被検体4の探傷面
の凹凸の大小により適宜法められる。膜2の材質は液3
の音響インピーダンスと同一ないし近似する値を有し、
かつ前記膜厚で液3の自重に耐える強度を有するものが
使用される。例えば液3が水の場合にはポリエチレンネ
オプレンゴム、シリコンゴム等の膜が使用される。
[2 indicates the dimensions of the liquid tank A and the specimen 4 to which the outer surface of the membrane 2 comes into contact.
Although it varies depending on the shape and surface roughness of the flaw detection surface, a very thin film with a thickness of, for example, several microns to several tens of microns is used. If the size of the liquid tank A is large, the weight of the liquid 3 in the liquid tank A is large and strength is required to support the weight, so the film thickness is relatively thick, several tens of microns or O.L.
On the other hand, if the dimensions of the liquid tank A are small, the film thickness may be thin in terms of strength. On the other hand, when the surface of the test object 4 has large irregularities, corners are detected, or the surface is rough, even if the film thickness is relatively thick, from several tens of microns to 0.1 am, the shape of the surface However, if the surface roughness is small, the thinner the film, the easier it will be to adapt to the roughness and adhere to the surface. The periphery of the membrane 2 is fixed around the liquid tank A so that the liquid 3 in the liquid tank A does not leak out, but the removed membrane 2 deforms into the arbitrary uneven surface shape of the test surface of the test object 4 and adheres tightly. It is fixed with some slack so that it can be fixed. Therefore, when the liquid 3 is placed in the liquid tank A, the membrane 2 bulges downward by the amount of slack, and in this state, the test surface of the test object 4 is brought into contact with the bulged outer surface of the membrane 2 by pushing it upward. or liquid tank A
When the probe is gently lowered onto the flaw detection surface of the object 4 installed on the outside of the test object 4 and comes into contact with the flaw detection surface, it comes into close contact with the flaw detection surface as shown in FIG. - As shown in the figure, a flange la is provided at the lower end of the peripheral wall 1 to fix the membrane 2 to the liquid tank A, and a stand 7 is provided with an adjuster 6 for adjusting the height of the liquid tank A below the flange la. Although the case where the periphery of the membrane 2 is sandwiched between the membranes 1 and 2 is shown, it may be attached to the inner or outer periphery of the peripheral wall 1. The amount of sagging of the membrane 2 described above is determined as appropriate depending on the size of the unevenness of the test surface of the test object 4. The material of membrane 2 is liquid 3
has a value that is the same as or similar to the acoustic impedance of
In addition, a material having the above-mentioned film thickness and strength enough to withstand the weight of the liquid 3 is used. For example, when the liquid 3 is water, a membrane made of polyethylene neoprene rubber, silicone rubber, etc. is used.

前記した構成の液槽Aにおいて、液3内に浸漬された探
触子5より液槽Aの外部にセットされた被検体4の探傷
面に超音波を発射すると、液槽Aの底面を形成している
膜2が前記探傷面の形状になじみ密着しており、かつ液
3と膜2の音響インピーダンスが同一ないし近似する値
を有するから。
In the liquid tank A having the above-described configuration, when ultrasonic waves are emitted from the probe 5 immersed in the liquid 3 to the test surface of the test object 4 set outside the liquid tank A, the bottom surface of the liquid tank A is formed. This is because the membrane 2 conforms to the shape of the flaw detection surface and is in close contact with it, and the acoustic impedances of the liquid 3 and the membrane 2 are the same or have similar values.

発射された超音波ビーム8はあたかも膜2が存在しない
かのように膜2における反射および透過による減衰がき
わめて少なく、はとんどそのまま被検体4内に入射され
、被検体4からの反射波も同様にほとんどそのまま探触
子5に受信される。これは被検体4が液槽Aの外にセッ
トされながらあたかも液3に浸漬されて探傷するかのよ
うな状態であり、従来の液浸法における被検体4が液3
内に浸漬されるために発生する液3の侵入9発錆。
The emitted ultrasonic beam 8 has very little attenuation due to reflection and transmission through the membrane 2, as if the membrane 2 did not exist, and enters the subject 4 as it is, causing reflected waves from the subject 4. Similarly, the signal is received by the probe 5 almost unchanged. This is a state where the specimen 4 is set outside the liquid tank A and is immersed in the liquid 3 for flaw detection.
3. Intrusion of liquid 9. Rust caused by being immersed in the interior.

汚染などの悪影響や、その悪影響を除去するための処理
工程などを完全に排除するとともに従来のt  液浸法
と同様に表面あらさなどの影響を受けることなく精度よ
く探傷することができる。また使用する液は通常使用さ
れている水がもっとも安価で入手しやすいが、水に限定
されることはなく比重の小さい油、アセトン、アルコー
ルなどを使用すれば膜2の厚さをそれだけ減することが
できる。
It completely eliminates the negative effects of contamination and other processing steps to remove the negative effects, and allows highly accurate flaw detection without being affected by surface roughness, like the conventional t-immersion method. In addition, the liquid to be used is usually water, which is the cheapest and easiest to obtain, but it is not limited to water; if you use oil, acetone, alcohol, etc. with a low specific gravity, the thickness of the membrane 2 can be reduced accordingly. be able to.

なお被検体4のセットはその探傷面が膜2とできるだけ
密着する必要があり、そのため台7に設けたアジャスタ
6を操作して液3の自重が膜2を介して探傷面に十分伝
わるように液槽Aの高さを調節する。また前記探傷面と
膜2との密着状態を促進するため探傷面に水、油、グリ
セリンなどのカップリング材を塗布する。
In addition, when setting the test object 4, it is necessary that its flaw detection surface is in close contact with the membrane 2 as much as possible, so the adjuster 6 provided on the stand 7 is operated to ensure that the weight of the liquid 3 is sufficiently transmitted to the flaw detection surface via the membrane 2. Adjust the height of liquid tank A. Further, in order to promote the close contact between the flaw detection surface and the membrane 2, a coupling material such as water, oil, or glycerin is applied to the flaw detection surface.

探傷の方法は従来の液浸法と同様に被検体4の探傷面に
超音波を入射し、その全域を探傷する場合には探触子5
を走査して行うほか、液槽Aおよび被検体4を載置した
基台9を探触子5に対して移動させて走査することも可
能であり、被検体4が液槽Aの外に置かれている構成の
ため被検体の種類、形状2寸法などに制限を受けること
なく直接接触法に準する容易さで探傷することができ。
The flaw detection method is similar to the conventional immersion method, in which ultrasonic waves are applied to the flaw detection surface of the object 4, and when the entire area is to be detected, the probe 5 is used.
In addition to scanning, it is also possible to scan by moving the base 9 on which the liquid tank A and the subject 4 are placed relative to the probe 5. Because of the configuration in which it is placed, flaw detection can be performed with ease similar to the direct contact method without being restricted by the type, shape, or dimensions of the object.

また液槽は自由に持ち運び可能に製作できるからリアル
タイムに探傷することができる。
Furthermore, since the liquid tank can be made freely portable, flaw detection can be performed in real time.

〔発明の効果〕 以上説明したように本発明の、超音波検査用の液槽は、
液槽の底面が、液槽内の液体の音響インピーダンスと同
一ないし近似する値を有し、かつ任意の凹凸面形状に変
形可能にたるみを有する状態で周辺を液槽外周に固着し
た膜で形成されたから、液槽の底面を液槽外に設置され
た被検体の探傷面に当接して探傷することを可能にし、
被検体の種類、形状2寸法2表面あらさ等に影響を受け
ることなく、かつ被検体に液の侵入1発錆、汚染等の悪
影響を与えることなく、容易に精度よく、しかもリアル
タイムに探傷することができる優れた実用上の効果を有
する。
[Effects of the Invention] As explained above, the liquid tank for ultrasonic inspection of the present invention has the following advantages:
The bottom surface of the liquid tank has a value that is the same as or approximates the acoustic impedance of the liquid in the liquid tank, and is made of a membrane that is fixed to the outer periphery of the liquid tank with a sag that can be deformed into any uneven surface shape. This makes it possible to perform flaw detection by touching the bottom of the liquid tank to the test surface of the test object installed outside the liquid tank.
To easily and precisely detect flaws in real time, without being affected by the type of specimen, shape, dimensions, surface roughness, etc., and without causing any adverse effects such as rust or contamination due to liquid intrusion into the specimen. It has excellent practical effects.

【図面の簡単な説明】[Brief explanation of drawings]

図は本発明の超音波検査用の液槽の1実施例を示す側断
面図・である。 1・・・周壁、2・・・膜、3・・・液、4・・・被検
体、5・・・探触子、6・・・アジャスタ、7・・・台
、8・・・超音波ビーム、9・・・基台、A・・・液槽
The figure is a side sectional view showing one embodiment of the liquid tank for ultrasonic testing of the present invention. DESCRIPTION OF SYMBOLS 1... Peripheral wall, 2... Membrane, 3... Liquid, 4... Test object, 5... Probe, 6... Adjuster, 7... Stand, 8... Super Sound wave beam, 9...base, A...liquid tank.

Claims (1)

【特許請求の範囲】 1、内部に浸漬用の液体が入れられ該液体に探触子を浸
漬させる超音波検査用の液槽において、液槽の底面が、
液槽内の液体の音響インピーダンスと同一ないし近似す
る値を有し、かつ任意の凹凸面形状に変形可能に、たる
みを有する状態で周辺を液槽外周に固着した膜で形成さ
れていることを特徴とする超音波検査用液槽。 2、液槽の底面が、液槽外に設置された被検体の探傷面
に当接されている状態で、液槽外より液槽を上下方向に
変位調整可能に構成したことを特徴とする特許請求の範
囲第1項記載の超音波検査用液槽。
[Claims] 1. In a liquid tank for ultrasonic testing in which an immersion liquid is placed and a probe is immersed in the liquid, the bottom surface of the liquid tank is
It has a value that is the same as or approximates the acoustic impedance of the liquid in the liquid tank, and is formed of a membrane that is fixed to the outer periphery of the liquid tank in a sagging state so that it can be deformed into any uneven surface shape. Characteristic liquid tank for ultrasonic testing. 2. The liquid tank is configured such that the liquid tank can be vertically displaced from outside the tank while the bottom surface of the liquid tank is in contact with the flaw detection surface of the test object installed outside the tank. A liquid tank for ultrasonic testing according to claim 1.
JP14838085A 1985-07-08 1985-07-08 Liquid tank for ultrasonic inspection Pending JPS629269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14838085A JPS629269A (en) 1985-07-08 1985-07-08 Liquid tank for ultrasonic inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14838085A JPS629269A (en) 1985-07-08 1985-07-08 Liquid tank for ultrasonic inspection

Publications (1)

Publication Number Publication Date
JPS629269A true JPS629269A (en) 1987-01-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP14838085A Pending JPS629269A (en) 1985-07-08 1985-07-08 Liquid tank for ultrasonic inspection

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Country Link
JP (1) JPS629269A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011227018A (en) * 2010-04-23 2011-11-10 Hitachi Cable Ltd Method for inspecting defect in semiconductor single crystal

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011227018A (en) * 2010-04-23 2011-11-10 Hitachi Cable Ltd Method for inspecting defect in semiconductor single crystal

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