JPS6291438U - - Google Patents

Info

Publication number
JPS6291438U
JPS6291438U JP18323985U JP18323985U JPS6291438U JP S6291438 U JPS6291438 U JP S6291438U JP 18323985 U JP18323985 U JP 18323985U JP 18323985 U JP18323985 U JP 18323985U JP S6291438 U JPS6291438 U JP S6291438U
Authority
JP
Japan
Prior art keywords
needle
semiconductor chip
semiconductor
testing device
insulating member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18323985U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18323985U priority Critical patent/JPS6291438U/ja
Publication of JPS6291438U publication Critical patent/JPS6291438U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は、この考案の一実施例による針２の拡
大詳細図、第２図は、従来の針２の拡大詳細図、
第３図は従来の半導体試験装置の部分断面図であ
る。 図において、２は針、４は絶縁部材である。な
お、各図中、同一符号は、同一または相当部分を
示すものである。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体チツプの電極に針を当て、この針から電
    流を入出力して上記半導体チツプの電気的特性の
    試験を行う半導体試験装置において、上記針の上
    記半導体チツプとの接触部分を除く少なくとも先
    端部分を絶縁部材により被覆したことを特徴とす
    る半導体試験装置。
JP18323985U 1985-11-26 1985-11-26 Pending JPS6291438U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18323985U JPS6291438U (ja) 1985-11-26 1985-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18323985U JPS6291438U (ja) 1985-11-26 1985-11-26

Publications (1)

Publication Number Publication Date
JPS6291438U true JPS6291438U (ja) 1987-06-11

Family

ID=31129792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18323985U Pending JPS6291438U (ja) 1985-11-26 1985-11-26

Country Status (1)

Country Link
JP (1) JPS6291438U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013219269A (ja) * 2012-04-11 2013-10-24 Mitsubishi Electric Corp 半導体装置の特性評価装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013219269A (ja) * 2012-04-11 2013-10-24 Mitsubishi Electric Corp 半導体装置の特性評価装置

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