JPS628966A - ウエハとリングフレ−ムの貼り合せ方法ならびに装置 - Google Patents

ウエハとリングフレ−ムの貼り合せ方法ならびに装置

Info

Publication number
JPS628966A
JPS628966A JP60148535A JP14853585A JPS628966A JP S628966 A JPS628966 A JP S628966A JP 60148535 A JP60148535 A JP 60148535A JP 14853585 A JP14853585 A JP 14853585A JP S628966 A JPS628966 A JP S628966A
Authority
JP
Japan
Prior art keywords
tape
wafer
ring
unit
winding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60148535A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0144621B2 (enrdf_load_stackoverflow
Inventor
Minoru Ametani
雨谷　稔
Keigo Funakoshi
船越　啓吾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Electric Industrial Co Ltd filed Critical Nitto Electric Industrial Co Ltd
Priority to JP60148535A priority Critical patent/JPS628966A/ja
Publication of JPS628966A publication Critical patent/JPS628966A/ja
Publication of JPH0144621B2 publication Critical patent/JPH0144621B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Dicing (AREA)
  • Control Of Cutting Processes (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Adhesive Tape Dispensing Devices (AREA)
JP60148535A 1985-07-05 1985-07-05 ウエハとリングフレ−ムの貼り合せ方法ならびに装置 Granted JPS628966A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60148535A JPS628966A (ja) 1985-07-05 1985-07-05 ウエハとリングフレ−ムの貼り合せ方法ならびに装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60148535A JPS628966A (ja) 1985-07-05 1985-07-05 ウエハとリングフレ−ムの貼り合せ方法ならびに装置

Publications (2)

Publication Number Publication Date
JPS628966A true JPS628966A (ja) 1987-01-16
JPH0144621B2 JPH0144621B2 (enrdf_load_stackoverflow) 1989-09-28

Family

ID=15454949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60148535A Granted JPS628966A (ja) 1985-07-05 1985-07-05 ウエハとリングフレ−ムの貼り合せ方法ならびに装置

Country Status (1)

Country Link
JP (1) JPS628966A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0307509A3 (en) * 1987-08-11 1990-01-24 Nitto Denko Corporation Sticking and cutoff device for adhesive tape for thin articles
JPH05178526A (ja) * 1991-12-26 1993-07-20 Santetsuku:Kk 接着用連続紙の自動接着方法とその装置
US5903422A (en) * 1996-06-21 1999-05-11 Nec Corporation Overcurrent sensing circuit for power MOS field effect transistor
KR100864985B1 (ko) * 2006-02-13 2008-10-23 도쿄 세이미츄 코퍼레이션 리미티드 웨이퍼 처리 장치
US7490650B2 (en) 2006-06-05 2009-02-17 Tokyo Seimitsu Co., Ltd. Workpiece processing device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0307509A3 (en) * 1987-08-11 1990-01-24 Nitto Denko Corporation Sticking and cutoff device for adhesive tape for thin articles
JPH05178526A (ja) * 1991-12-26 1993-07-20 Santetsuku:Kk 接着用連続紙の自動接着方法とその装置
US5903422A (en) * 1996-06-21 1999-05-11 Nec Corporation Overcurrent sensing circuit for power MOS field effect transistor
KR100864985B1 (ko) * 2006-02-13 2008-10-23 도쿄 세이미츄 코퍼레이션 리미티드 웨이퍼 처리 장치
US7563643B2 (en) 2006-02-13 2009-07-21 Tokyo Seimitsu Co., Ltd. Wafer processing apparatus
US7490650B2 (en) 2006-06-05 2009-02-17 Tokyo Seimitsu Co., Ltd. Workpiece processing device

Also Published As

Publication number Publication date
JPH0144621B2 (enrdf_load_stackoverflow) 1989-09-28

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