JPS6289140U - - Google Patents
Info
- Publication number
- JPS6289140U JPS6289140U JP1985181815U JP18181585U JPS6289140U JP S6289140 U JPS6289140 U JP S6289140U JP 1985181815 U JP1985181815 U JP 1985181815U JP 18181585 U JP18181585 U JP 18181585U JP S6289140 U JPS6289140 U JP S6289140U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cleaning device
- water
- gas
- substrate cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 239000007921 spray Substances 0.000 claims 1
Landscapes
- Elimination Of Static Electricity (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985181815U JPS6289140U (ko) | 1985-11-26 | 1985-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985181815U JPS6289140U (ko) | 1985-11-26 | 1985-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6289140U true JPS6289140U (ko) | 1987-06-08 |
Family
ID=31127031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985181815U Pending JPS6289140U (ko) | 1985-11-26 | 1985-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6289140U (ko) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55162379A (en) * | 1979-06-04 | 1980-12-17 | Fujitsu Ltd | Pure water washing method |
| JPS603121A (ja) * | 1983-06-21 | 1985-01-09 | Oki Electric Ind Co Ltd | 半導体ウエハの処理方法 |
| JPS6240459A (ja) * | 1985-08-16 | 1987-02-21 | Toshiba Corp | プレ−トクリ−ナ |
-
1985
- 1985-11-26 JP JP1985181815U patent/JPS6289140U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55162379A (en) * | 1979-06-04 | 1980-12-17 | Fujitsu Ltd | Pure water washing method |
| JPS603121A (ja) * | 1983-06-21 | 1985-01-09 | Oki Electric Ind Co Ltd | 半導体ウエハの処理方法 |
| JPS6240459A (ja) * | 1985-08-16 | 1987-02-21 | Toshiba Corp | プレ−トクリ−ナ |