JPS55162379A - Pure water washing method - Google Patents

Pure water washing method

Info

Publication number
JPS55162379A
JPS55162379A JP6970379A JP6970379A JPS55162379A JP S55162379 A JPS55162379 A JP S55162379A JP 6970379 A JP6970379 A JP 6970379A JP 6970379 A JP6970379 A JP 6970379A JP S55162379 A JPS55162379 A JP S55162379A
Authority
JP
Japan
Prior art keywords
pure water
water washing
washing method
pure
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6970379A
Other languages
Japanese (ja)
Inventor
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6970379A priority Critical patent/JPS55162379A/en
Publication of JPS55162379A publication Critical patent/JPS55162379A/en
Pending legal-status Critical Current

Links

JP6970379A 1979-06-04 1979-06-04 Pure water washing method Pending JPS55162379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6970379A JPS55162379A (en) 1979-06-04 1979-06-04 Pure water washing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6970379A JPS55162379A (en) 1979-06-04 1979-06-04 Pure water washing method

Publications (1)

Publication Number Publication Date
JPS55162379A true JPS55162379A (en) 1980-12-17

Family

ID=13410466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6970379A Pending JPS55162379A (en) 1979-06-04 1979-06-04 Pure water washing method

Country Status (1)

Country Link
JP (1) JPS55162379A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116033A (en) * 1980-02-18 1981-09-11 Chiyou Lsi Gijutsu Kenkyu Kumiai Washing method for photomask
JPS60226130A (en) * 1984-04-25 1985-11-11 Nec Corp Manufacture of semiconductor device and apparatus for the same
JPS6289140U (en) * 1985-11-26 1987-06-08
JPH01114043A (en) * 1987-10-28 1989-05-02 Teru Kyushu Kk Cleaning method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502503U (en) * 1973-05-10 1975-01-11
JPS5340140U (en) * 1976-09-11 1978-04-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502503U (en) * 1973-05-10 1975-01-11
JPS5340140U (en) * 1976-09-11 1978-04-07

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116033A (en) * 1980-02-18 1981-09-11 Chiyou Lsi Gijutsu Kenkyu Kumiai Washing method for photomask
JPS60226130A (en) * 1984-04-25 1985-11-11 Nec Corp Manufacture of semiconductor device and apparatus for the same
JPH051615B2 (en) * 1984-04-25 1993-01-08 Nippon Electric Co
JPS6289140U (en) * 1985-11-26 1987-06-08
JPH01114043A (en) * 1987-10-28 1989-05-02 Teru Kyushu Kk Cleaning method

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