JPS55162379A - Pure water washing method - Google Patents
Pure water washing methodInfo
- Publication number
- JPS55162379A JPS55162379A JP6970379A JP6970379A JPS55162379A JP S55162379 A JPS55162379 A JP S55162379A JP 6970379 A JP6970379 A JP 6970379A JP 6970379 A JP6970379 A JP 6970379A JP S55162379 A JPS55162379 A JP S55162379A
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- water washing
- washing method
- pure
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6970379A JPS55162379A (en) | 1979-06-04 | 1979-06-04 | Pure water washing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6970379A JPS55162379A (en) | 1979-06-04 | 1979-06-04 | Pure water washing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55162379A true JPS55162379A (en) | 1980-12-17 |
Family
ID=13410466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6970379A Pending JPS55162379A (en) | 1979-06-04 | 1979-06-04 | Pure water washing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55162379A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56116033A (en) * | 1980-02-18 | 1981-09-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Washing method for photomask |
JPS60226130A (en) * | 1984-04-25 | 1985-11-11 | Nec Corp | Manufacture of semiconductor device and apparatus for the same |
JPS6289140U (en) * | 1985-11-26 | 1987-06-08 | ||
JPH01114043A (en) * | 1987-10-28 | 1989-05-02 | Teru Kyushu Kk | Cleaning method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS502503U (en) * | 1973-05-10 | 1975-01-11 | ||
JPS5340140U (en) * | 1976-09-11 | 1978-04-07 |
-
1979
- 1979-06-04 JP JP6970379A patent/JPS55162379A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS502503U (en) * | 1973-05-10 | 1975-01-11 | ||
JPS5340140U (en) * | 1976-09-11 | 1978-04-07 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56116033A (en) * | 1980-02-18 | 1981-09-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Washing method for photomask |
JPS60226130A (en) * | 1984-04-25 | 1985-11-11 | Nec Corp | Manufacture of semiconductor device and apparatus for the same |
JPH051615B2 (en) * | 1984-04-25 | 1993-01-08 | Nippon Electric Co | |
JPS6289140U (en) * | 1985-11-26 | 1987-06-08 | ||
JPH01114043A (en) * | 1987-10-28 | 1989-05-02 | Teru Kyushu Kk | Cleaning method |
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