JPH0199481U - - Google Patents
Info
- Publication number
- JPH0199481U JPH0199481U JP19687187U JP19687187U JPH0199481U JP H0199481 U JPH0199481 U JP H0199481U JP 19687187 U JP19687187 U JP 19687187U JP 19687187 U JP19687187 U JP 19687187U JP H0199481 U JPH0199481 U JP H0199481U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- nozzle
- cleaning chamber
- storage box
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19687187U JPH0199481U (ko) | 1987-12-24 | 1987-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19687187U JPH0199481U (ko) | 1987-12-24 | 1987-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0199481U true JPH0199481U (ko) | 1989-07-04 |
Family
ID=31487461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19687187U Pending JPH0199481U (ko) | 1987-12-24 | 1987-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0199481U (ko) |
-
1987
- 1987-12-24 JP JP19687187U patent/JPH0199481U/ja active Pending