JPS6288558A - Working system - Google Patents

Abstract

PURPOSE:To maximize the efficiency of operation and improve the efficiency of production by providing a management control section for controlling the shift of workpieces to each working process according to a process time of each working process and process proceeding situation and a production plan calculation controlling section connected to said management control section. CONSTITUTION:While a diffusing process of a wafer proceeds in a diffusing furnace 1A, the proceeding condition is monitored through a transmission circuit 3A by a diffusing chamber management control section 3 to control a next wafer putting time tN from preset wafer diffusing process time, pretreatment time and time of putting wafer into the diffusing furnace. And at the time tN, the next process wafer is searched from a group of wafers which are given data such as types, process methods, required production date when the wafer is received from a production plan calculation control section 4 to a diffusing chamber 5 so that pretreatment is indicated. Next, at the diffusing process completing time, the next process wafer pretreated and transferred stands by and immediately receives the next process. Further, actual result data are transmitted from the management control section 3 to the calculation control section 4 to review the production plan for attaining the high efficiency of operation.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a processing system for parts that require many processing steps.

[Technical background of the invention]

For example, in a semiconductor factory, processing into squares is performed one after another using processing equipment that is compatible with a large number of processing steps. Normally, a production plan is created by considering the production capacity of each processing device and determining how many products of a certain type to be produced by how many days. In this case, the production capacity of each processing device increases as the operating rate increases.
Become. The productivity of a semiconductor factory is determined by how much the operating rate of each processing device can be increased, and therefore a processing system for improving the operating rate is required.

[Problems with background technology]

However, conventionally, production capacity has been calculated based on the number of processing devices and the average operating rate. A production plan is established based on this production capacity calculation data, and instructions are given for process input and processing plans for sea urchins. First, there was a problem that the actual operating rate of the processing equipment did not improve.0 [Object of the Invention] The present invention solves the above-mentioned drawbacks and provides a processing system that improves the operating ratio of the processing equipment. It is.

[Summary of the invention]

The present invention provides a processing system comprising a plurality of processing steps, including a management control unit that controls movement of a workpiece to each processing step based on the processing time and processing progress status of each processing step;
It is characterized by comprising a production planning calculation control section connected to this management control section.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to the drawings. For example, a wafer processing and manufacturing system used in a diffusion process in a semiconductor factory will be explained with reference to the drawings.

1A to IN are diffusion furnaces, which are the main processing equipment in the diffusion process, and 2A to 2N are cleaning machines, which are pretreatment equipment in the diffusion process. The progress of the diffusion process is monitored by the diffusion chamber management control section 3 through a transmission line. Diffusion processing time T for a given query, and preprocessing time T! and diffusion furnace ware 1 input time t.

Then, the next wafer loading time tN is controlled.

ts '' tll + T, - ('r, +a) Here, α is the transport, handling time, etc. At time tN, the next wafer to be processed is transferred to the production planning calculation control unit 4.
When a wafer is received into the diffusion chamber 5, it is searched among a group of wafers to which data such as product type, processing method, and end date of R manufacturing are given, and preprocessing instructions are given. (The Queue 1 group has been sent from another processing process and is stored in the stocker 6.) At the completion time t, = t, + T, of the diffusion process, the pre-processing, transportation, etc. The wafer to be processed is waiting and can be processed immediately. Furthermore, the production plan is reviewed by transmitting the processing performance data from the diffusion chamber management control unit to the production planning calculation control unit, and the production capacity calculated based on the average operating rate is corrected based on the actual operating rate. It is possible to create a production plan with a high operating rate.

〔Effect of the invention〕

As explained above, according to the present invention, it is possible to realize a processing system that performs processing by maximizing the operating rate of processing equipment and has high production efficiency.

[Brief explanation of drawings]

Figure 1 is a block diagram of a processing system showing an embodiment of the present invention, and Figure 2 is a layout diagram of processing equipment. ...Transmission line, 3. Diffusion chamber management control section, 4. Production planning calculation control section, 5. Diffusion chamber, 6. Stocker. Agent Patent Attorney Noriyuki Chika Yudo Hirofumi Mitsumata Figure 1 Figure 2

Claims (1)

[Claims] In a processing system consisting of a plurality of processing steps, there is a management control section that controls the movement of the workpiece to each processing step based on the processing time and processing progress status of each processing step, and a production system connected to this management control section. A processing system comprising a planning calculation control section.