JPS6287431U - - Google Patents
Info
- Publication number
- JPS6287431U JPS6287431U JP17843185U JP17843185U JPS6287431U JP S6287431 U JPS6287431 U JP S6287431U JP 17843185 U JP17843185 U JP 17843185U JP 17843185 U JP17843185 U JP 17843185U JP S6287431 U JPS6287431 U JP S6287431U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- reactor core
- boat
- heat treatment
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17843185U JPS6287431U (enExample) | 1985-11-20 | 1985-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17843185U JPS6287431U (enExample) | 1985-11-20 | 1985-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6287431U true JPS6287431U (enExample) | 1987-06-04 |
Family
ID=31120553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17843185U Pending JPS6287431U (enExample) | 1985-11-20 | 1985-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6287431U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09320973A (ja) * | 1996-05-30 | 1997-12-12 | Nec Yamagata Ltd | ウェハ搬出入装置 |
-
1985
- 1985-11-20 JP JP17843185U patent/JPS6287431U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09320973A (ja) * | 1996-05-30 | 1997-12-12 | Nec Yamagata Ltd | ウェハ搬出入装置 |
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