JPS6287431U - - Google Patents

Info

Publication number
JPS6287431U
JPS6287431U JP17843185U JP17843185U JPS6287431U JP S6287431 U JPS6287431 U JP S6287431U JP 17843185 U JP17843185 U JP 17843185U JP 17843185 U JP17843185 U JP 17843185U JP S6287431 U JPS6287431 U JP S6287431U
Authority
JP
Japan
Prior art keywords
core tube
reactor core
boat
heat treatment
guide rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17843185U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17843185U priority Critical patent/JPS6287431U/ja
Publication of JPS6287431U publication Critical patent/JPS6287431U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の概略構成図、第２図はガイド
レールとガイド車輪の関係を示す説明図である。 １……炉心管、２……ガイドレール、３……石
英ボート、３１……車輪、３２……ガイド車輪。 FIG. 1 is a schematic configuration diagram of the present invention, and FIG. 2 is an explanatory diagram showing the relationship between a guide rail and a guide wheel. 1... Furnace tube, 2... Guide rail, 3... Quartz boat, 31... Wheel, 32... Guide wheel.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 熱処理を行う半導体基板をボートに塔載して、
ボートごと炉心管内に挿入して熱処理を行う熱処
理装置において、炉心管内には炉心管の長さ方向
に直状のガイドレールを、前記炉心管内に挿入す
るボートは前記ガイドレールに沿つて回転する車
輪を備えている事を特徴とする熱処理装置。 Semiconductor substrates to be heat treated are loaded onto a boat,
In a heat treatment apparatus in which a boat is inserted into a reactor core tube for heat treatment, a guide rail that is straight in the length direction of the reactor core tube is installed in the reactor core tube, and a boat that is inserted into the reactor core tube has wheels that rotate along the guide rail. A heat treatment device characterized by being equipped with.
JP17843185U 1985-11-20 1985-11-20 Pending JPS6287431U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17843185U JPS6287431U (en) 1985-11-20 1985-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17843185U JPS6287431U (en) 1985-11-20 1985-11-20

Publications (1)

Publication Number Publication Date
JPS6287431U true JPS6287431U (en) 1987-06-04

Family

ID=31120553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17843185U Pending JPS6287431U (en) 1985-11-20 1985-11-20

Country Status (1)

Country Link
JP (1) JPS6287431U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09320973A (en) * 1996-05-30 1997-12-12 Nec Yamagata Ltd Wafer transfer device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09320973A (en) * 1996-05-30 1997-12-12 Nec Yamagata Ltd Wafer transfer device

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