JPS6285387U - - Google Patents
Info
- Publication number
- JPS6285387U JPS6285387U JP17728285U JP17728285U JPS6285387U JP S6285387 U JPS6285387 U JP S6285387U JP 17728285 U JP17728285 U JP 17728285U JP 17728285 U JP17728285 U JP 17728285U JP S6285387 U JPS6285387 U JP S6285387U
- Authority
- JP
- Japan
- Prior art keywords
- distal end
- extrusion member
- hollow portion
- end surface
- inner circumferential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001125 extrusion Methods 0.000 claims description 4
- 238000009423 ventilation Methods 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図はこの考案の一実施例をチヤツク状態で
示す断面図、第２図は同アンチヤツク状態で示す
断面図、第３図はこの考案の他の実施例をチヤツ
ク状態で示す断面図、第４図は同アンチヤツク状
態で示す断面図、第５図は従来のバキユームチヤ
ツクを示す断面図である。
１……小部品、１０……本体部、１１……吸着
面、１２……中空部、１３……給排気ポート、１
５……押出し部材、１６……溝、１９……小孔、
２０……切欠溝。
FIG. 1 is a sectional view showing an embodiment of this invention in a chucked state, FIG. 2 is a sectional view showing the same in an unchucked state, and FIG. FIG. 4 is a sectional view showing the same in the unlocked state, and FIG. 5 is a sectional view showing the conventional vacuum chuck. 1... Small parts, 10... Main body, 11... Adsorption surface, 12... Hollow part, 13... Supply/exhaust port, 1
5... Extrusion member, 16... Groove, 19... Small hole,
20... Notch groove.
Claims (1)
に開口しかつ給排気ポートに連通した中空部が形
成され、前進端で前記先端面より前方に突出する
押出し部材が前記中空部内に所定範囲前後動自在
に挿入され、かつその押出し部材の外周に、後退
端において前記中空部の内周面から一部離隔して
通気路を形成するとともに後退端からわずか前進
した位置より先端側で前記中空部の内周面全体に
密着して通気路を閉じる開閉部が形成されている
ことを特徴とするエジエクタ付バキユームチヤツ
ク。 A hollow portion is formed in the main body portion whose distal end surface is a suction surface and is open to the distal end surface and communicates with the air supply/exhaust port, and an extrusion member that protrudes forward from the distal end surface at a forward end is positioned within the hollow portion. The extrusion member is inserted so as to be movable back and forth within a range, and a ventilation passage is formed on the outer periphery of the extrusion member at a position partially separated from the inner circumferential surface of the hollow portion at the retracted end, and at the tip side from a position slightly advanced from the retracted end. A vacuum chuck with an ejector characterized in that an opening/closing part is formed in close contact with the entire inner circumferential surface of a hollow part to close an air passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17728285U JPS6285387U (en) | 1985-11-18 | 1985-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17728285U JPS6285387U (en) | 1985-11-18 | 1985-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6285387U true JPS6285387U (en) | 1987-05-30 |
Family
ID=31118338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17728285U Pending JPS6285387U (en) | 1985-11-18 | 1985-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6285387U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006093865A (en) * | 2004-09-21 | 2006-04-06 | Tokyo Denpa Co Ltd | Piezoelectric blank piece sorter |
| JP2008238312A (en) * | 2007-03-27 | 2008-10-09 | Yasuo Yamanaka | Article suction device |
| WO2014132292A1 (en) * | 2013-02-28 | 2014-09-04 | ヤマハ発動機株式会社 | Suction nozzle and surface mounting device |
| JP2015063437A (en) * | 2013-09-26 | 2015-04-09 | Hoya株式会社 | Adsorption device, transport device, and optical element manufacturing device |
-
1985
- 1985-11-18 JP JP17728285U patent/JPS6285387U/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006093865A (en) * | 2004-09-21 | 2006-04-06 | Tokyo Denpa Co Ltd | Piezoelectric blank piece sorter |
| JP2008238312A (en) * | 2007-03-27 | 2008-10-09 | Yasuo Yamanaka | Article suction device |
| WO2014132292A1 (en) * | 2013-02-28 | 2014-09-04 | ヤマハ発動機株式会社 | Suction nozzle and surface mounting device |
| CN105359636A (en) * | 2013-02-28 | 2016-02-24 | 雅马哈发动机株式会社 | Suction nozzle and surface mounting device |
| JP5913731B2 (en) * | 2013-02-28 | 2016-04-27 | ヤマハ発動機株式会社 | Suction nozzle and surface mounter |
| JP2015063437A (en) * | 2013-09-26 | 2015-04-09 | Hoya株式会社 | Adsorption device, transport device, and optical element manufacturing device |
| CN104512998A (en) * | 2013-09-26 | 2015-04-15 | Hoya株式会社 | Adsorption device, carrying device, and manufacturing device of optical element |
| TWI634242B (en) * | 2013-09-26 | 2018-09-01 | Ｈｏｙａ股份有限公司 | Pickup device, transfer device, and optical device manufacturing device |