JPS6285388U - - Google Patents
Info
- Publication number
- JPS6285388U JPS6285388U JP17728385U JP17728385U JPS6285388U JP S6285388 U JPS6285388 U JP S6285388U JP 17728385 U JP17728385 U JP 17728385U JP 17728385 U JP17728385 U JP 17728385U JP S6285388 U JPS6285388 U JP S6285388U
- Authority
- JP
- Japan
- Prior art keywords
- large diameter
- diameter portion
- distal end
- rear end
- hollow portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001125 extrusion Methods 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図はこの考案の一実施例をチヤツク状態で
示す断面図、第２図は同アンチヤツク状態で示す
断面図、第３図はこの考案の他の実施例をチヤツ
ク状態で示す断面図、第４図は従来のバキユーム
チヤツクを示す断面図である。
１……小部品、１０……本体部、１１……吸着
面、１２……中空部、１３……給排気ポート、１
４……押出し部材、１４ａ……大径部、１６……
通気路、１７……チエツク弁、２０……小孔。
FIG. 1 is a sectional view showing an embodiment of this invention in a chucked state, FIG. 2 is a sectional view showing the same in an unchucked state, and FIG. FIG. 4 is a sectional view showing a conventional vacuum chuck. 1... Small parts, 10... Main body, 11... Adsorption surface, 12... Hollow part, 13... Supply/exhaust port, 1
4... Extrusion member, 14a... Large diameter portion, 16...
Ventilation passage, 17...check valve, 20...small hole.
Claims (1)
に開口しかつ後端側で給排気ポートに連通した中
空部が形成されるとともに、前進端で前記先端面
より前方に突出しかつ後端側の大径部で前記中空
部の内周面に摺接する押出し部材が、前記中空部
内に所定範囲前後動自在に挿入され、かつその押
出し部材の内部には、前記中空部内で前記大径部
より後側の所定箇所と大径部より前側の所定箇所
との両方に開口する通気路が形成され、さらにそ
の通気路内に前記大径部の後端側から前端側に向
けた空気の流れを阻止するチエツク弁が内蔵され
ていることを特徴とするエジエクタ付バキユーム
チヤツク。 A hollow part is formed in the main body part whose distal end surface is a suction surface, and which is open at the distal end surface and communicates with the air supply/exhaust port at the rear end side, and which protrudes forward from the distal end surface at the forward end and at the rear end. An extrusion member whose side large diameter portion slides into contact with the inner peripheral surface of the hollow portion is inserted into the hollow portion so as to be movable back and forth within a predetermined range, and inside the extrusion member, the large diameter portion is inserted into the hollow portion. A ventilation path is formed that opens both at a predetermined location on the rear side and at a predetermined location on the front side of the large diameter portion, and air flows from the rear end side of the large diameter portion toward the front end side within the ventilation path. A vacuum chuck with an ejector, which is characterized by having a built-in check valve to prevent this.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17728385U JPS6285388U (en) | 1985-11-18 | 1985-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17728385U JPS6285388U (en) | 1985-11-18 | 1985-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6285388U true JPS6285388U (en) | 1987-05-30 |
Family
ID=31118340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17728385U Pending JPS6285388U (en) | 1985-11-18 | 1985-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6285388U (en) |
-
1985
- 1985-11-18 JP JP17728385U patent/JPS6285388U/ja active Pending