JPS6283127U - - Google Patents

Info

Publication number
JPS6283127U
JPS6283127U JP17369285U JP17369285U JPS6283127U JP S6283127 U JPS6283127 U JP S6283127U JP 17369285 U JP17369285 U JP 17369285U JP 17369285 U JP17369285 U JP 17369285U JP S6283127 U JPS6283127 U JP S6283127U
Authority
JP
Japan
Prior art keywords
air
room
adhesive
dust
floor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17369285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0233049Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17369285U priority Critical patent/JPH0233049Y2/ja
Publication of JPS6283127U publication Critical patent/JPS6283127U/ja
Application granted granted Critical
Publication of JPH0233049Y2 publication Critical patent/JPH0233049Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP17369285U 1985-11-12 1985-11-12 Expired JPH0233049Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17369285U JPH0233049Y2 (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17369285U JPH0233049Y2 (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Publications (2)

Publication Number Publication Date
JPS6283127U true JPS6283127U (enrdf_load_stackoverflow) 1987-05-27
JPH0233049Y2 JPH0233049Y2 (enrdf_load_stackoverflow) 1990-09-06

Family

ID=31111393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17369285U Expired JPH0233049Y2 (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Country Status (1)

Country Link
JP (1) JPH0233049Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011032109A (ja) * 2009-07-30 2011-02-17 Nippon Steel Corp 炭化珪素単結晶製造装置
JP2011147842A (ja) * 2010-01-19 2011-08-04 Vessel Industrial Co Ltd 除電除塵装置
JP2021167723A (ja) * 2021-07-15 2021-10-21 株式会社西部技研 クリーンブース

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011032109A (ja) * 2009-07-30 2011-02-17 Nippon Steel Corp 炭化珪素単結晶製造装置
JP2011147842A (ja) * 2010-01-19 2011-08-04 Vessel Industrial Co Ltd 除電除塵装置
JP2021167723A (ja) * 2021-07-15 2021-10-21 株式会社西部技研 クリーンブース

Also Published As

Publication number Publication date
JPH0233049Y2 (enrdf_load_stackoverflow) 1990-09-06

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