JPS6281787A - Thick film circuit part - Google Patents

Thick film circuit part

Info

Publication number
JPS6281787A
JPS6281787A JP22188985A JP22188985A JPS6281787A JP S6281787 A JPS6281787 A JP S6281787A JP 22188985 A JP22188985 A JP 22188985A JP 22188985 A JP22188985 A JP 22188985A JP S6281787 A JPS6281787 A JP S6281787A
Authority
JP
Japan
Prior art keywords
thick film
glass
circuit part
film circuit
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22188985A
Other languages
Japanese (ja)
Inventor
塩田 孝夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP22188985A priority Critical patent/JPS6281787A/en
Publication of JPS6281787A publication Critical patent/JPS6281787A/en
Pending legal-status Critical Current

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  • Glass Compositions (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は電気回路特に厚膜電気回路にして、高lA機械
的強度全必要とする部品の構造に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention This invention relates to the construction of components in electrical circuits, particularly thick film electrical circuits, requiring high IA mechanical strength.

従来の技術およびその問題点 従来この種の厚膜回路の代表的な構造の一つは、セ その強度全保持する友めに金属表面にほうるガラス層を
設け、その上に金属の厚膜導体ケプリントしたいわゆる
ほうろう基盤が知られている。
Conventional technology and its problems Conventionally, one of the typical structures of this type of thick film circuit is to provide a glass layer on the metal surface to maintain all the strength of the circuit, and a thick film of metal on top of that. So-called enamel substrates printed with conductors are known.

このようなほうろう基盤に於ては金属とガラスという全
碍膨張係数、伸性、可撓性などの緒特性の全く異なる材
料ケ一体化している点で実用に当つて信頼性に問題なし
としないものであった。
In this type of enamel base, there are no problems with reliability in practical use because metal and glass, materials with completely different properties such as total thermal expansion coefficient, elongation, and flexibility, are integrated. It was something.

このほうろう基盤に代るものとして、セラミック基体上
に厚膜導体回路を形収したセラミック回路も実用化され
ているが、セラミックは可撓性がないばかりでなく、衝
撃等でチッピング、亀裂等を発生し易く、機械的強度に
難点をかかえているものである。
As an alternative to this enamel substrate, ceramic circuits in which thick-film conductor circuits are formed on ceramic substrates have been put into practical use, but ceramics are not only inflexible but also susceptible to chipping, cracking, etc. due to impact, etc. This easily occurs and poses a problem in terms of mechanical strength.

問題点全解決するための手段 本発明は上記の如き問題点を解決する之めに鋭に金属と
接合力の強いガラス層を設け、更シてその上に電気回路
を設は友ものである。
Means for Solving All Problems In order to solve the above-mentioned problems, the present invention sharply provides a glass layer with strong bonding strength to metal, and after that, an electric circuit is installed on top of the glass layer. .

又、この電気回路は銅箔等の回路材料を焼付はフォトエ
ツチング法で回路化してもLrし、 cVD法等により
薄膜技術で設けてもよいし導電性金属をペースト印刷し
てもよい。
Further, this electric circuit may be formed by baking a circuit material such as a copper foil or by photo-etching, or may be formed by a thin film technique such as a cVD method, or by paste printing a conductive metal.

作  用 オキシナイト”ライトガラスはEE S i −0−S
 i壬?N″?l−置換した 三S i −N −S i玉の構造含有するので密度が
高く、i II+ ヤング基も太きいため強度に優れ、これ?基盤材料とし
て用いているので従来のほうろう基盤、又はセラミック
基盤にない優れた信頼性のよい回路部品を提供すること
がてきる。
Function: Oxinite light glass is EE Si-0-S
I? It has a high density because it contains a structure of N''?l-substituted tri-S i -N -S i beads, and the i II+ Young group is also thick, so it has excellent strength, and because it is used as a base material, it can be used as a conventional enamel base. Alternatively, it is possible to provide circuit components with excellent reliability that are not available on ceramic substrates.

いれが工いが例えば金属封着用のガラス組成物として知
られている結晶化ガラス等は耐熱性にも優れ好ましいも
のである。
For example, crystallized glass, which is known as a glass composition for metal sealing, is preferable because it has excellent heat resistance.

実施例 実施例]  8i0260X量%、A#2053重量%
、1320614重量%、Na2O16M 11%、n
ao 7重量%の組収のガラスフリット1重量部1’t
: 8 r 5N40.1重量部?加えこれをBN製坩
堝?用いてN2雰囲気中で800℃で焼成しガラス化し
てシート状にし′fc。
Examples] 8i0260X amount%, A#2053 weight%
, 1320614% by weight, Na2O16M 11%, n
ao 7% by weight glass frit 1 part by weight 1't
: 8 r 5N40.1 parts by weight? In addition, is this a BN crucible? It was fired at 800°C in a N2 atmosphere to vitrify it and form it into a sheet.'fc.

このシートの上NIVCは8 r 5Na Tl”混入
しないガラスフリット層を介して電解銅箔を同時焼付け
して回路部品を得た。銅箔は後にエツチングに工す回路
を形成せしめた。
On this sheet, NIVC co-baked an electrolytic copper foil through a layer of 8r5NaTl''-free glass frit to obtain a circuit component.The copper foil was later etched to form a circuit.

実施例2 8i0231重量%、A#2052重量%、
B20,5電蓄%、oao3oi雪%、Zn010 :
ii%、+Fo02 m ft%、(=r20520 
i!!: it%?含むガラスフリット1重量部1c 
A#N fl、 1重量部を加え、BN坩堝を用い、N
2雰囲気中でガラス化しシート状にした。
Example 2 8i0231% by weight, A#2052% by weight,
B20,5 electric storage%, oao3oi snow%, Zn010:
ii%, +Fo02 m ft%, (=r20520
i! ! : it%? Contains 1 part by weight of glass frit 1c
Add 1 part by weight of A#N fl, use a BN crucible, and
It was vitrified in a 2 atmosphere and made into a sheet.

この上に銅箔をのせて焼成し接合せしめて回路部品を得
几。銅箔は後にエツチングにエリ回路を形成せしめた。
Copper foil is placed on top of this, fired, and bonded to obtain circuit components. The copper foil was later etched to form the edge circuit.

なお上記に於てオキシナイトライトガラス基材に結合用
のガラス層を用いた場合と用いない場合を含有せしめ定
組成のものが適用し得るが結晶化ガラスは耐熱性もあり
、結合用ガラスとしては最も好ましい。
In addition, in the above, it is possible to apply a fixed-composition product in which the oxynitrite glass base material contains a bonding glass layer with or without a bonding glass layer, but crystallized glass is also heat resistant and can be used as a bonding glass. is most preferred.

比較例 0.7酬の鉄板上に5i02 + AjD20349.
5%、820512%、Li2O+ Na2O+ K2
O]  Z 5%、Na3AlF6+ Na2SiF6
6.0%、TiO220%からなる(1うbら材料ケ塗
布焼付けてガラス化せしめこのガラス層の中1cNi5
%、 Ti l 0%、 Fe 35%からなる金属W
、濁液ケ所定のパターンにコーティングして1200℃
で焼結して1ト〉ろ〉回路基盤全製作した。
Comparative Example 5i02 + AjD20349 on the iron plate of 0.7.
5%, 820512%, Li2O+ Na2O+ K2
O] Z 5%, Na3AlF6+ Na2SiF6
6.0% TiO2 and 20% TiO2.
%, metal W consisting of 0% Ti, 35% Fe
, coat the cloudy liquid in a predetermined pattern and heat it at 1200°C.
I sintered it and made the entire circuit board.

発明の効果 上記実施例]、2及び比較例について次の工うな試験ケ
行なった。
Effects of the Invention The following tests were conducted on the above Examples, 2 and Comparative Examples.

(1)耐熱試験 200℃、100時間連結加熱後(2
)耐ハンダ試験 250℃溶融ハンダ3分間浸漬後の表
面外観 (3)強度試験 20 +a X 50鴎 厚さ1朗t
のサンプルケ水平にしてその一端ケ接合支 持し、他の遊離端Vc訃もり?加え、 折れたときの1食 (4)ヒートサイクル −40℃−25℃ −120℃
/8hr試験    】サイクルで100サイクル後の
表面外観 これに工っで判る工うに本発明に係る回路基盤は機械的
強度にも極めて優れているのみならず1よ′)ろう回路
基盤同様に耐熱性が優れていることが判る。
(1) Heat resistance test After continuous heating at 200℃ for 100 hours (2
) Solder resistance test Surface appearance after immersion in 250°C molten solder for 3 minutes (3) Strength test 20 + a
Place the sample horizontally and support one end of the joint, while the other free end is connected to Vc. In addition, one serving when broken (4) Heat cycle -40℃-25℃ -120℃
/8hr test] Surface appearance after 100 cycles It can be seen from this that the circuit board according to the present invention not only has extremely excellent mechanical strength, but also has the same heat resistance as the soldered circuit board. is found to be superior.

Claims (1)

【特許請求の範囲】[Claims] オキシナイトライトガラスを基材としてこれに電気回路
部を設けたことを特徴とする電気回路部品。
An electric circuit component characterized in that an electric circuit portion is provided on oxynitrite glass as a base material.
JP22188985A 1985-10-07 1985-10-07 Thick film circuit part Pending JPS6281787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22188985A JPS6281787A (en) 1985-10-07 1985-10-07 Thick film circuit part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22188985A JPS6281787A (en) 1985-10-07 1985-10-07 Thick film circuit part

Publications (1)

Publication Number Publication Date
JPS6281787A true JPS6281787A (en) 1987-04-15

Family

ID=16773761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22188985A Pending JPS6281787A (en) 1985-10-07 1985-10-07 Thick film circuit part

Country Status (1)

Country Link
JP (1) JPS6281787A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6489803A (en) * 1987-09-30 1989-04-05 Shimadzu Corp Membrane member for radome

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6489803A (en) * 1987-09-30 1989-04-05 Shimadzu Corp Membrane member for radome

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