JPS6279912A - Very thin cutting edge - Google Patents

Abstract

PURPOSE:To improve workability of a cutting edge and its life, by providing a hard grain-contained metal film layer to adhere onto an amorphous metal thin strip leaving an exposed part. CONSTITUTION:The material is based on one or two kinds or more of Fe, Ni and Co. A cutting edge 7 is constituted of an amoprhous alloy thin strip 5. The cutting edge is formed in a 0.015-0.080mm thickness while in an averaged width equal to or smaller than a value 250 times the thickness. A hard grain-contained metal film 6 adheres by the publicly known method to the surface of said thin strip leaving an exposed part. A hard drain can be suitably selected in those used in the past. The film 6, consisting of a hard grain 6a and a metal combined phase 6b, is dispersed in a spot pattern. Accordingly, a material to be cut can be efficiently cut further with a good yield rate.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a belt-shaped ultra-thin cutting blade, and in particular, the invention relates to a belt-shaped ultra-thin cutting blade that can be used to cut various materials, especially semiconductor materials. This relates to a belt-shaped ultra-thin cutting blade used for cutting.

[Conventional technology]

In general, many semiconductor devices are manufactured from plate-shaped semiconductors obtained by cutting rod-state crystals of various semiconductor materials such as silicon, gallium arsenide, and indium phosphide. Conventionally, an inner peripheral blade attached to a slicing machine has been used as the cutting blade, but in recent years the thickness of the inner peripheral blade has increased in response to the increase in the diameter of semiconductor materials, and the cutting allowance has increased accordingly. Due to this trend, recently, the method of cutting with a multi-band saw has been attracting attention as a cutting method to deal with this. SK material (carbon tool steel) is used, and it is further manufactured by an ultra-rapid solidification method to create an amorphous metal ribbon (hereinafter simply referred to as a ribbon) and hard particles such as diamond powder on the surface of this ribbon. It has also been proposed to use a multi-pantone cutting blade by attaching it to the entire surface.

[Problems to be Solved by the Invention] However, even with the multi-pantone, if the cutting blade is made of SK material, its tensile strength is insufficient, so if the blade wears out during cutting, However, since the tensile strength of the cutting blade cannot withstand the tension applied to both ends of the blade and the cutting blade breaks during cutting, there is a limit to how thin the blade can be to reduce the cutting allowance. The edge of the cutting edge of the SK material in high-quality metal thin strip is also strong, so if you use it as a multi-band saw blade, you can make the cutting allowance even smaller. The cutting method using a cutting blade is originally a free abrasive method in which abrasive is supplied together with cutting oil from the outside.Please note that the cutting speed is originally very slow, and it is necessary to smooth the cutting oil and abrasive during cutting. Because it is difficult to supply cutting oil to the surface of the cutting blade, the cutting blade is subjected to extremely high cutting resistance, and the cooling effect of the cutting oil on the cutting blade surface is reduced.
Furthermore, during cutting, chips from the workpiece are not removed smoothly, and the abrasive is not replaced sufficiently with each stroke, resulting in increased cutting resistance, which increases the power required for cutting and increases the cutting time. However, if hard particles are attached to the entire surface of the ribbon and a Multi-Pantone cutting blade is used, the cutting resistance will be high and the cutting resistance will be high. There were problems in that the speed was poor and the cutting allowance and chipping increased.

[Findings based on research]

Therefore, as a result of various studies to solve the above-mentioned problems, the present inventors have found that (1) the surface of the thin strip is exposed in the form of spots or stripes on the amorphous metal thin strip stopper; When a metal covering layer containing hard particles made of diamond, alumina, silicon carbide, titanium carbide, boron carbon dioxide, silicon oxide, boron nitride, etc. is attached to the remaining parts, the hard particles themselves As the cutting blade performs its function, the sharpness improves and the cutting speed improves, while the cutting resistance during cutting is lowered, and the removal of chips and replacement of abrasive with each stroke are promoted. (2) Fe, Ni and Co are used as amorphous metals.
When an alloy based on one or more of these is used, the strength when made into a thin ribbon is extremely high, and even if it is slightly worn during cutting, it can withstand the tension applied during cutting. (3) Average thickness: 0.015 to 0.080 m (15 to 8
The thin strip having a diameter of 0 μ) is relatively easy to manufacture, and its tensile strength area is low so that it can be installed as a cutting blade in a multi-band saw without bending or twisting due to the low tension. The cutting allowance can be reduced to approximately less than 100μ, and (4) the average width and average thickness of the cutting blade are W (W) and T (mmm), respectively.
When expressed as: W/T≦250, the deflection of the blade during cutting is suppressed, the blade wears uniformly, and as a result, the cutting margin becomes smaller and the life of the cutting blade is extended.
I found out.

[Means for solving problems]

This invention was invented based on the above-mentioned knowledge, and is a long-life product that has excellent workability, can withstand large tensions, and can cut objects efficiently and with a high yield without causing any grinding or blurring. The purpose of the present invention is to provide an ultra-thin cutting blade, which is a band-shaped ultra-thin cutting blade made of an amorphous alloy ribbon based on one or more of Fe, Ni, and Co as a base, The ribbon has an average thickness of T-0,015 to 0.080 m, where the average thickness of the ribbon is T (mm), the average width is W (sw), and W/
The cutting blade has an average width that satisfies the relationship T≦250, and is characterized in that the cutting blade is composed of a front monotonous coating layer.

[Specific configuration of the invention]

(1) Material of the cutting blade As the amorphous alloy in this invention, various amorphous alloys based on iron group metals can be used, in particular one or two of Si and B. Species: 1-10
A component containing one or more of V, Ti, and Nb: 1 to 5%, with the remainder consisting of one or more of Fe, Ni, and Co and inevitable impurities. The amorphous alloy with the composition has a hardness of about HV: 1000, has very little wear during use compared to hardened steel, and has a high tensile strength of 300 to 400 kg/-, which is extremely It can withstand enough tension to prevent deflection and wobbling that occur due to the thin blade thickness, and as a result, a small cutting allowance and long-term use can be achieved.

(2) Average thickness of ribbon It is difficult to manufacture an amorphous alloy ribbon with an average thickness of less than 0.015W, and it is difficult to produce an amorphous alloy ribbon with an average thickness of less than 0.015W.
When attached as a cutting blade to a multi-band saw, it is extremely difficult to stretch this thin strip onto a multi-band saw with a tension smaller than its tensile strength without causing the blade to deflect or twist. When the height exceeds 0.080m, -
Since the cutting allowance per knife becomes 100μ or more, which reduces the yield of the material to be cut, in this invention, the average thickness of the cutting blade is set at 0.015 to 0.080 m.90(3) Value of W/T of thin strip The average width of the cutting blade is W (m), and the average thickness is T (mm).
Expressed as t, if W/T > 250, when the cutting blade is incorporated into a multi-band saw, the deflection and wobbling of the blade will be corrected no matter how much tension is applied to both ends of the blade within the strength of the cutting blade. Therefore, the value of W/T was set at 250 or less because the blade could not be worn out locally during use and the blade would break early.

(4) Coating layer (1) Hard particles The hard particles to be contained in the coating layer can be appropriately selected from hard particles conventionally used in cutting, grinding, polishing, etc. of various materials. for example,
Diamond, alumina, silicon carbide, arsenic carbide, tungsten carbide, titanium carbide, boron carbide, silicon oxide, boron nitride, or ceramics or cermets containing these materials are preferably used, and the particle size is determined in relation to the blade thickness. 2-
It is preferable to select from a range of 20 μm, and the preferred ratio of the hard particles to be included in the coating layer varies depending on the material of the object to be cut, the desired roughness of the cut surface, etc., so it cannot be specified in general. Generally speaking, increasing the content of hard particles improves sharpness and increases processing speed, but on the other hand, the roughness of the cut surface and chipping increase, and in general, when the content is less than 5% by volume, the cutting surface roughness and chipping increase. , the blade becomes dull, cutting resistance increases, and the life of the blade is shortened. On the other hand, when it exceeds 65% by volume, the content of metal components that hold hard particles becomes relatively low, and the holding power of hard particles decreases. Generally, the content of hard particles is preferably 5 to 65% by volume, since the hard particles tend to fall off during cutting and chipping increases.

(11) Metal binding phase The metals used to hold the hard particles and fix them to the amorphous alloy thin band include the metals that have been used in various fields to bond various hard particles as mentioned above. In this invention, as will be described later, it is particularly preferable to form the coating layer by plating, so metals suitable for this plating, such as Ni, C, etc. can be used.
o, or alloys thereof are advantageously used.

(Thickness of the coating layer The thickness of the coating layer depends on the average particle size of the hard particles, the dimensions of the ribbon, the desired characteristics of the cutting blade, the type of material to be cut, the cutting conditions, etc.) Although it cannot be specified, in general, the average particle size of the hard particles is between 2 and 3.
5 times, or within the range of the average thickness and average width of the ribbons already mentioned, it is considered preferable to have the average thickness of the 70 ribbons about 174.

OV) Adhesion state of the coating layer If the coating layer containing hard particles is entirely adhered to the ribbon, the various effects described above that are produced by providing this coating layer cannot be obtained. It is essential to provide this coating layer while leaving an exposed portion of the ribbon surface K. Generally, it is preferable that the exposed portions of the ribbon surface K have a similar shape and are uniformly distributed with similar dimensions. Cutting blades are advantageously used in which the covering layer or the exposed portions are formed on the ribbon in the form of spots, stripes or a mixture thereof.

In this way, when the exposed portions of a coating layer of approximately the same size on the ribbon are uniformly distributed, if the proportion of the area occupied by the coating layer on the ribbon surface is too large, chips may form. If there is no place to escape and the effect of this invention cannot be obtained, on the other hand, if the ratio is too small, that is, if the ratio of the area of the exposed part of the thin film surface is too large, the sharpness will deteriorate and the cutting time will become longer, which will result in Since the effects of this invention cannot be obtained,
In this invention, it is generally suitable to form a coating layer in which the ratio of the length of the shortest part of the coating layer/the shortest distance between adjacent coating layers is 0.1 to 10.

[Incidental matters to the invention]

The ultra-thin cutting blade of the present invention is manufactured, for example, by the method described below.

(1) Amorphous alloy ribbon First, the amorphous alloy ribbon 5 which is the base of the cutting blade of the present invention
As shown in FIG. 2, this is equipped with an induction heating coil 2 for heating an iron group metal-based alloy to a temperature higher than its melting temperature, and a nozzle 3 with a slit is formed at the bottom of the crucible. The molten metal is injected from the nozzle 3 onto the cooling roll 4 disposed close to the bottom thereof by the pressure of the injection gas, and is rapidly cooled and solidified on the surface of the cooling roll 4. .

This roll is usually made of steel or copper, generally steel is used when the amorphous alloy is Fe-based, and copper is used when the amorphous alloy is Ni- and Co-based, and during use e.g. It rotates at a circumferential speed of 5 to 30 m/sec.

As the injection gas, an inert gas having a pressure of 0.01 to IKf/-, which does not melt into the molten metal and does not react with it, such as argon or helium, is used;
Furthermore, in order to prevent the molten metal from being oxidized until it is rapidly solidified on the cooling roll 4 and becomes the ribbon 5, an atmosphere of about 0.5 to 1 aim of argon or helium is added. Gas is supplied.

(11) Formation of coating layer The coating layer can be attached to the surface of the nine thin ribbon manufactured in this manner by any method that can uniformly form the coating layer to a predetermined thickness. However, it is usually convenient to form the coating layer by electroplating using a plating solution in which the hard particles are dispersed. Preferably, a method is used in which a thin hard resin film is attached to the thin strip to cover the plating, and the thin film is removed after plating. The cutting blade 7 may have a large number of plating layers 6, for example, dispersed in spots, made of a metal bonding phase 6b and a metal bonding phase 6b.

[Examples and effects based on the examples]

Next, the present invention will be explained using actual winding examples while comparing with comparative examples.

According to the already mentioned single-roll liquid quenching method, the nozzle...
・Made of quartz, slit dimensions: 0.3m x 8m, cooling roll...copper roll, roll peripheral speed...18-30m/
sec, injection gas... Argon gas with a pressure of 0.1 to 0.6 odor/-, atmospheric gas... Argon gas with a pressure of 0.8 atm, both length = 40
Producing amorphous alloy ribbons having dimensions of 0 ttm x width 5-, and having the composition and thickness shown in Table 1, it is confirmed that each of these ribbons is amorphous. Confirmed by X-ray diffraction diagram, then each of these thin strips was screen printed with a button masking on its surface, and then sequentially.
After performing electrolytic degreasing, water washing, electrolytic elution, electrolytic reduction, water washing, Ni strike plating, and water washing, diamond-dispersed nickel plating is applied with a nickel plating solution containing diamond powder as hard particles, and then a thin strip of masking material is applied. By peeling it off, a hollow cutting blade 7 shown in FIG. 1(a) was manufactured.

Here, the cutting blade 1 of the present invention shown in Table 1 has N i
804 ・6 H2O: 300 f/
lNiC7!2 ・6H,0: 4
0f#HaBOs” 4
01/1 brightener: Trace amount anti-bit agent: Trace amount diamond powder average particle size: 5μ Diamond concentration: 200 y/no DH:
4.0, and by applying diamond-dispersed nickel plating under the following conditions: plating bath temperature: 45°C, anode current density: IA/d71, plating time: 70 minutes, while stirring the plating solution. , and the cutting blade 2 of the present invention shown in Table 1
-6 was manufactured in the same manner as above except for changing the average particle size of the diamond powder, the concentration in the liquid, and the plating time. Of these, the cutting blade 4 of the present invention was also manufactured with a bang masking on the edge of the cutting edge as shown in Fig. 1. Cutting blade 7' as shown in (b) and t
o For further comparison, a comparative cutting blade in which a diamond particle-containing nickel plating film was adhered to the entire surface of both surfaces of the ribbon was also manufactured in the same manner as the above method, except that the bang masking was not performed.

Next, in order to evaluate the performance of these cutting blades, 100 of each type of cutting blade were placed at 1 inch intervals, and 1001'I! The length of the cutting blade was 400m, the length of the stroke was 170+w, the number of strokes was 280 reciprocations/i, the diameter was 150- x Length: A 300 m cylindrical silicon ingot was cut, and the average cutting distance and cutting time obtained in this cutting test are also shown in Table 1.

The results shown in Table 1 show that when cutting with cutting blades 1-6 of the present invention, the coating layer is attached to the entire surface of the ribbon, and the average cutting distance and chipping are smaller compared to the cutting blade of 9 comparisons. It also shows that the cutting time is short, and it can be seen that the cutting blade of the present invention outperforms the comparative cutting blades not only in terms of cutting efficiency but also in the yield of cut objects.

[Comprehensive effect of the invention]

As is clear from the above description, the present invention provides a long-life machine that has excellent workability, can withstand large tensions without bending or wobbling, and can cut objects efficiently and with a high yield. The industrially useful effect of being able to provide an ultra-thin cutting blade can be obtained.

[Brief explanation of drawings]

FIG. 1 is a partially enlarged sectional view schematically illustrating the state of the cutting blade of the present invention, and FIG. 2 is a perspective view showing the essential parts of an example of a method for manufacturing an amorphous metal ribbon. be. In the figure, 1...crucible, 2...visiting heating coil. 3... Nozzle, 4... Cooling roll. 5...Amorphous metal ribbon, 6...Coating layer. 7.7'--Ultra-thin cutting blade.

Claims (4)

[Claims] (1) A belt-shaped ultra-thin cutting blade whose base material is an amorphous alloy ribbon based on one or more of Fe, Ni, and Co, wherein the ribbon is The average thickness is T(
mm), when the average width is expressed in W (mm), T=0.
Average thickness of 0.015-0.080mm and W/T≦250
and the cutting blade is composed of the ribbon and a metal coating layer containing hard particles attached to the surface of the ribbon, leaving an exposed part of the ribbon surface. The ultra-thin cutting blade is characterized in that: (2) The amorphous alloy constituting the ribbon is one or two of Si and B: 1 to 10% by weight
, V, Ti and Nb or more: 1-
5% by weight, one or more of Fe, Ni, and Co, and unavoidable impurities: the remainder, the ultrathin cut according to claim (1). blade. (3) The ultra-thin cutting blade according to claim (1) or (2), wherein the hard particle-containing metal coating layer is made of a plating film. (4) Claim 1, wherein the hard particle-containing metal coating layer is attached to the surface of the ribbon in the form of spots, stripes, or a mixture thereof.
) to (3).