JPS6279355U - - Google Patents
Info
- Publication number
- JPS6279355U JPS6279355U JP17118685U JP17118685U JPS6279355U JP S6279355 U JPS6279355 U JP S6279355U JP 17118685 U JP17118685 U JP 17118685U JP 17118685 U JP17118685 U JP 17118685U JP S6279355 U JPS6279355 U JP S6279355U
- Authority
- JP
- Japan
- Prior art keywords
- anode
- cathode
- ion pump
- applying
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案の一実施例の構成図、第２図は
第１図に示すチタン陰極板１と陽極板２の間に印
加される電圧の時間的変化を表わしたグラフ、第
３図は従来のイオンポンプの構成図である。
１，５……チタン陰極板、２，７……陽極板、
３……主電源、４……イオン化促進電源、６……
イオンポンプ電源。
FIG. 1 is a configuration diagram of an embodiment of the present invention, FIG. 2 is a graph showing temporal changes in the voltage applied between the titanium cathode plate 1 and the anode plate 2 shown in FIG. 1, and FIG. is a configuration diagram of a conventional ion pump. 1, 5...Titanium cathode plate, 2,7...Anode plate,
3...Main power supply, 4...Ionization promotion power supply, 6...
Ion pump power supply.
Claims (1)
るための陰極と、前記陽極と前記陰極間に周期的
に高電圧となる変化する電圧を印加する電源とを
含むことを特徴とするイオンポンプ。 An ion pump comprising an anode, a cathode for emitting electrons that ionize gas molecules, and a power source for applying a periodically changing high voltage between the anode and the cathode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17118685U JPS6279355U (en) | 1985-11-06 | 1985-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17118685U JPS6279355U (en) | 1985-11-06 | 1985-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6279355U true JPS6279355U (en) | 1987-05-21 |
Family
ID=31106584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17118685U Pending JPS6279355U (en) | 1985-11-06 | 1985-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6279355U (en) |
-
1985
- 1985-11-06 JP JP17118685U patent/JPS6279355U/ja active Pending