JPS62112839U - - Google Patents
Info
- Publication number
- JPS62112839U JPS62112839U JP19279285U JP19279285U JPS62112839U JP S62112839 U JPS62112839 U JP S62112839U JP 19279285 U JP19279285 U JP 19279285U JP 19279285 U JP19279285 U JP 19279285U JP S62112839 U JPS62112839 U JP S62112839U
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- ion source
- cathodes
- pair
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Description
第1図は本考案の一実施例を示す断面の模式図
、第2図は従来のPIGイオン源の断面の概略を
示した模式図である。
11……陰極、13……突部。
FIG. 1 is a schematic cross-sectional view showing an embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view showing an outline of a conventional PIG ion source. 11...Cathode, 13...Protrusion.
Claims (1)
けられたことを特徴とするPIGイオン源。 A PIG ion source characterized in that a protrusion is provided on the mutually facing end surfaces of a pair of cathodes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19279285U JPS62112839U (en) | 1985-12-14 | 1985-12-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19279285U JPS62112839U (en) | 1985-12-14 | 1985-12-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62112839U true JPS62112839U (en) | 1987-07-18 |
Family
ID=31148206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19279285U Pending JPS62112839U (en) | 1985-12-14 | 1985-12-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62112839U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006093137A (en) * | 2004-09-20 | 2006-04-06 | Samsung Electronics Co Ltd | Ion injection device having arc chamber for improving ion current density |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4511519Y1 (en) * | 1966-07-14 | 1970-05-22 |
-
1985
- 1985-12-14 JP JP19279285U patent/JPS62112839U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4511519Y1 (en) * | 1966-07-14 | 1970-05-22 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006093137A (en) * | 2004-09-20 | 2006-04-06 | Samsung Electronics Co Ltd | Ion injection device having arc chamber for improving ion current density |