JPS6277436A - 電気抵抗材料およびそれを用いた薄膜素子 - Google Patents

電気抵抗材料およびそれを用いた薄膜素子

Info

Publication number
JPS6277436A
JPS6277436A JP60218439A JP21843985A JPS6277436A JP S6277436 A JPS6277436 A JP S6277436A JP 60218439 A JP60218439 A JP 60218439A JP 21843985 A JP21843985 A JP 21843985A JP S6277436 A JPS6277436 A JP S6277436A
Authority
JP
Japan
Prior art keywords
thin film
chromium
aluminum alloy
alloy
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60218439A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0457740B2 (enExample
Inventor
Sadao Yoshizaki
吉崎　完生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUSUMU IND CO Ltd
Original Assignee
SUSUMU IND CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUSUMU IND CO Ltd filed Critical SUSUMU IND CO Ltd
Priority to JP60218439A priority Critical patent/JPS6277436A/ja
Publication of JPS6277436A publication Critical patent/JPS6277436A/ja
Publication of JPH0457740B2 publication Critical patent/JPH0457740B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
    • C22C27/06—Alloys based on chromium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Adjustable Resistors (AREA)
  • Conductive Materials (AREA)
  • Electronic Switches (AREA)
JP60218439A 1985-09-30 1985-09-30 電気抵抗材料およびそれを用いた薄膜素子 Granted JPS6277436A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60218439A JPS6277436A (ja) 1985-09-30 1985-09-30 電気抵抗材料およびそれを用いた薄膜素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60218439A JPS6277436A (ja) 1985-09-30 1985-09-30 電気抵抗材料およびそれを用いた薄膜素子

Publications (2)

Publication Number Publication Date
JPS6277436A true JPS6277436A (ja) 1987-04-09
JPH0457740B2 JPH0457740B2 (enExample) 1992-09-14

Family

ID=16719929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60218439A Granted JPS6277436A (ja) 1985-09-30 1985-09-30 電気抵抗材料およびそれを用いた薄膜素子

Country Status (1)

Country Link
JP (1) JPS6277436A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018090856A (ja) * 2016-12-02 2018-06-14 公益財団法人電磁材料研究所 高温で熱安定性に優れた歪センサ用薄膜合金

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5822379A (ja) * 1981-07-30 1983-02-09 Tama Denki Kogyo Kk スパツタリング用タ−ゲツト
JPS6024343A (ja) * 1983-07-20 1985-02-07 Taisei Koki Kk 金属薄膜抵抗体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5822379A (ja) * 1981-07-30 1983-02-09 Tama Denki Kogyo Kk スパツタリング用タ−ゲツト
JPS6024343A (ja) * 1983-07-20 1985-02-07 Taisei Koki Kk 金属薄膜抵抗体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018090856A (ja) * 2016-12-02 2018-06-14 公益財団法人電磁材料研究所 高温で熱安定性に優れた歪センサ用薄膜合金

Also Published As

Publication number Publication date
JPH0457740B2 (enExample) 1992-09-14

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