JPS6276550U - - Google Patents

Info

Publication number
JPS6276550U
JPS6276550U JP1986170472U JP17047286U JPS6276550U JP S6276550 U JPS6276550 U JP S6276550U JP 1986170472 U JP1986170472 U JP 1986170472U JP 17047286 U JP17047286 U JP 17047286U JP S6276550 U JPS6276550 U JP S6276550U
Authority
JP
Japan
Prior art keywords
light
semiconductor device
under test
emitting semiconductor
device under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986170472U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986170472U priority Critical patent/JPS6276550U/ja
Publication of JPS6276550U publication Critical patent/JPS6276550U/ja
Pending legal-status Critical Current

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Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の発光半導体装置の寿命試験装置
の1例を示す図であり、第2図は本考案による発
光半導体装置の寿命試験装置の1実例を示す図で
ある。 1……被試験発光半導体装置、2……光検出器
、3……恒温槽、4……光フアイバー、5……光
出力。
FIG. 1 is a diagram showing an example of a conventional life test apparatus for a light emitting semiconductor device, and FIG. 2 is a diagram showing an example of a life test apparatus for a light emitting semiconductor device according to the present invention. DESCRIPTION OF SYMBOLS 1... Light emitting semiconductor device under test, 2... Photodetector, 3... Constant temperature chamber, 4... Optical fiber, 5... Light output.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 恒温槽内に被試験発光半導体装置を設置して前
記発光半導体装置の試験を行なう試験装置におい
て、前記被試験半導体装置の光出力側に対向して
光フアイバーの入光端部を前記恒温槽内に設置し
、前記光フアイバーの出力端部を前記恒温槽外に
導き、該恒温槽外に設置した光検知器に入射させ
て被試験半導体装置の光出力を監視する構成とな
つていることを特徴とする発光半導体装置の試験
装置。
In a test device in which a light-emitting semiconductor device under test is installed in a thermostatic oven and the light-emitting semiconductor device is tested, the light input end of the optical fiber is placed in the thermostatic oven, facing the light output side of the semiconductor device under test. The output end of the optical fiber is guided outside the constant temperature chamber, and the light output of the semiconductor device under test is monitored by making it incident on a photodetector installed outside the constant temperature chamber. Test equipment for light-emitting semiconductor devices.
JP1986170472U 1986-11-06 1986-11-06 Pending JPS6276550U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986170472U JPS6276550U (en) 1986-11-06 1986-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986170472U JPS6276550U (en) 1986-11-06 1986-11-06

Publications (1)

Publication Number Publication Date
JPS6276550U true JPS6276550U (en) 1987-05-16

Family

ID=31105234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986170472U Pending JPS6276550U (en) 1986-11-06 1986-11-06

Country Status (1)

Country Link
JP (1) JPS6276550U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03145127A (en) * 1989-10-31 1991-06-20 Toshiba Corp Measuring device for etching depth

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924685A (en) * 1972-07-03 1974-03-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924685A (en) * 1972-07-03 1974-03-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03145127A (en) * 1989-10-31 1991-06-20 Toshiba Corp Measuring device for etching depth

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