JPS6275064U - - Google Patents
Info
- Publication number
- JPS6275064U JPS6275064U JP16634685U JP16634685U JPS6275064U JP S6275064 U JPS6275064 U JP S6275064U JP 16634685 U JP16634685 U JP 16634685U JP 16634685 U JP16634685 U JP 16634685U JP S6275064 U JPS6275064 U JP S6275064U
- Authority
- JP
- Japan
- Prior art keywords
- substrate support
- substrate
- support device
- heat
- resistant insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 18
- 238000012856 packing Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims 2
- 229910052582 BN Inorganic materials 0.000 claims 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
- 239000004809 Teflon Substances 0.000 claims 1
- 229920006362 Teflon® Polymers 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 238000010292 electrical insulation Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16634685U JPS6275064U (enrdf_load_stackoverflow) | 1985-10-28 | 1985-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16634685U JPS6275064U (enrdf_load_stackoverflow) | 1985-10-28 | 1985-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6275064U true JPS6275064U (enrdf_load_stackoverflow) | 1987-05-14 |
Family
ID=31097228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16634685U Pending JPS6275064U (enrdf_load_stackoverflow) | 1985-10-28 | 1985-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6275064U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012140681A (ja) * | 2010-12-28 | 2012-07-26 | Sharp Corp | ヤトイ治具 |
-
1985
- 1985-10-28 JP JP16634685U patent/JPS6275064U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012140681A (ja) * | 2010-12-28 | 2012-07-26 | Sharp Corp | ヤトイ治具 |