JPS61150855U - - Google Patents

Info

Publication number
JPS61150855U
JPS61150855U JP3317785U JP3317785U JPS61150855U JP S61150855 U JPS61150855 U JP S61150855U JP 3317785 U JP3317785 U JP 3317785U JP 3317785 U JP3317785 U JP 3317785U JP S61150855 U JPS61150855 U JP S61150855U
Authority
JP
Japan
Prior art keywords
support device
substrate support
substrate
heat
resistant insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3317785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3317785U priority Critical patent/JPS61150855U/ja
Publication of JPS61150855U publication Critical patent/JPS61150855U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3317785U 1985-03-08 1985-03-08 Pending JPS61150855U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3317785U JPS61150855U (enrdf_load_stackoverflow) 1985-03-08 1985-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3317785U JPS61150855U (enrdf_load_stackoverflow) 1985-03-08 1985-03-08

Publications (1)

Publication Number Publication Date
JPS61150855U true JPS61150855U (enrdf_load_stackoverflow) 1986-09-18

Family

ID=30535383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3317785U Pending JPS61150855U (enrdf_load_stackoverflow) 1985-03-08 1985-03-08

Country Status (1)

Country Link
JP (1) JPS61150855U (enrdf_load_stackoverflow)

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