JPS6273137A - 試料分解装置及びそれを用いた試料分解方法 - Google Patents

試料分解装置及びそれを用いた試料分解方法

Info

Publication number
JPS6273137A
JPS6273137A JP21260285A JP21260285A JPS6273137A JP S6273137 A JPS6273137 A JP S6273137A JP 21260285 A JP21260285 A JP 21260285A JP 21260285 A JP21260285 A JP 21260285A JP S6273137 A JPS6273137 A JP S6273137A
Authority
JP
Japan
Prior art keywords
sample
acid
container
pure water
decomposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21260285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357422B2 (enExample
Inventor
Hideki Matsunaga
秀樹 松永
Naoyuki Hirate
平手　直之
Akira Okada
章 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21260285A priority Critical patent/JPS6273137A/ja
Publication of JPS6273137A publication Critical patent/JPS6273137A/ja
Publication of JPH0357422B2 publication Critical patent/JPH0357422B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP21260285A 1985-09-27 1985-09-27 試料分解装置及びそれを用いた試料分解方法 Granted JPS6273137A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21260285A JPS6273137A (ja) 1985-09-27 1985-09-27 試料分解装置及びそれを用いた試料分解方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21260285A JPS6273137A (ja) 1985-09-27 1985-09-27 試料分解装置及びそれを用いた試料分解方法

Publications (2)

Publication Number Publication Date
JPS6273137A true JPS6273137A (ja) 1987-04-03
JPH0357422B2 JPH0357422B2 (enExample) 1991-09-02

Family

ID=16625408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21260285A Granted JPS6273137A (ja) 1985-09-27 1985-09-27 試料分解装置及びそれを用いた試料分解方法

Country Status (1)

Country Link
JP (1) JPS6273137A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301142A (ja) * 1988-03-17 1989-12-05 Toshiba Corp 半導体分解装置
JPH04286956A (ja) * 1991-03-15 1992-10-12 Nec Corp 化学分析法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301142A (ja) * 1988-03-17 1989-12-05 Toshiba Corp 半導体分解装置
JPH04286956A (ja) * 1991-03-15 1992-10-12 Nec Corp 化学分析法

Also Published As

Publication number Publication date
JPH0357422B2 (enExample) 1991-09-02

Similar Documents

Publication Publication Date Title
US6077451A (en) Method and apparatus for etching of silicon materials
Hollabaugh et al. ADSORPTION OF WATER AND POLAR PARAFFINIC COMPOUNDS ONTO RUTILE1
Rovida et al. Effects of oxygen on silver surface structure
EP0137409B1 (en) Resolution device for semiconductor thin films
US5851303A (en) Method for removing metal surface contaminants from silicon
JP3051023B2 (ja) 珪素質分析試料中の不純物高精度分析のための処理方法及びその装置
US5877027A (en) Method for the analysis of impurity contents in silicon dioxide
Arthur Gallium arsenide surface structure and reaction kinetics: Field emission microscopy
Hino et al. Photoelectron spectra of metallofullerenes, GdC82 and La2C80: Electron transfer from the metal to the cage
JP3487334B2 (ja) シリコン基板中の不純物分析方法
Kozlov et al. TlBr crystal growth, purification and characterisation
Steinberg Radioassay of aqueous solutions mixed with solid crystalline fluors
JPS6273137A (ja) 試料分解装置及びそれを用いた試料分解方法
JP3755586B2 (ja) 珪素脱離方法及びシリコンウェーハの不純物分析方法
JPH0530209B2 (enExample)
JP3753805B2 (ja) 半導体試料の分解装置および試料分解方法
JPH06160256A (ja) 試料分解方法及びその装置
Piechotka et al. Mass spectrometric investigation of the vapor of nonstoichiometric and doped mercuric iodide
JPH07333116A (ja) 試料分解装置及び試料分解方法
TW442314B (en) Method and apparatus of concentrating chemicals for semiconductor device
JPH10253511A (ja) 不純物分析試料用容器
JPH0525068B2 (enExample)
Knutsen et al. Characterization of the gaseous and solid products of aluminum sulfate decomposition
JPS61144545A (ja) 薄膜薄板溶解装置
Amsel et al. Handling, purification and recovery of isotopically enriched water or gases for isotopic tracing experiments with ion beam analysis in electrochemistry and physics