JPS6267832A - Autoloader for ion-implanting device - Google Patents

Abstract

PURPOSE:To realize the reduction of dropping any foreign matters on the surface of a wafer, the improvement of yield and the compact structure of titled device by a method wherein a wafer cassette lifter and a wafer carrier loading the wafer on the topmost position are combined with each other. CONSTITUTION:Firstly wafer cassettes 1 containing wafers 2 are loaded upon an autoloader 7. Then the wafers 2 are successively carried from the wafer cassettes 1 to a wafer lifter 9 to be lifted at this position for deliverying the wafers 2 to a wafer carrier 8. Later the wafers 2 are installed into an ion- implanting device 6 by the wafer carrier 8. The wafers 2 can be recovered by the procedures reverse thereto. Through these procedures, the sticking of any foreign matters on the wafers 2 can be reduced; the autoloader can be made compact; and in case of a failure of the autoloader, it is no trouble of the manual works of an operator, thereby enabling the ion implanting device to be operated satisfactorily.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an autoloader for loading wafers from a wafer cassette into an ion implanter and vice versa.

[Background of the invention]

In the conventional autoloader, as shown in FIG. 2, the wafers 2 are sequentially taken out from the wafer cassette 1 by the motor 3 by the vertical movement of the ball screw 4 and the movement of the belt 5, and then the wafers 2 are loaded by the motor 3 and the ball screw 4. It is attached to the ion implantation device FIT6. In addition, the reverse operation of collecting wafers into a wafer cassette is also performed.

This autoloader has a ball screw 4, which is a cover, over the wafer transport, and has the disadvantage that there is a possibility that foreign matter may fall onto the wafer.

In addition, this autoloader is very large, and if the autoloader breaks down, the autoloader will become an obstacle, making manual work difficult for the operator.

Incidentally, the ion implantation device and the wafer autoloader are introduced in the 1984 edition of Electronic Materials Special Edition, "Very LSI Manufacturing and Testing Equipment," published by Kogyo Kenkyukai, November 15, 1980, pages 81-86.

[Purpose of the invention]

One object of the present invention is to reduce the adhesion of foreign matter onto wafers.

Another object of the present invention is to make the autoloader compact so that even if the autoloader breaks down, the ion implantation apparatus can be operated without interfering with the manual work of one operator.

[Summary of the invention]

According to one embodiment of the present invention, a drive system for transporting a wafer with wafer 2 at the uppermost position is provided, thereby reducing foreign matter falling onto the wafer.

(Embodiments of the invention) FIG. 1 shows a side view of an autoloader 7 according to the present invention.

First, the wafer cassette 1 containing the wafers 2 is placed on the autoloader 7. Thereafter, the wafers 2 are sequentially transported from the wafer cassette 1 to the wafer lifter 9 and raised, and at this position, the wafers 2 are received and transferred to the wafer transport section 8.

Thereafter, the wafer 2 is mounted on the ion implantation device 6 by the wafer transfer section 8.

To recover the wafer 2, the operation is reverse to that described above.

〔Effect of the invention〕

1. Since there is no drive unit above the wafer, the amount of foreign matter falling onto the wafer surface is reduced and the yield is improved.

2. It is more compact, and even if the autoloader breaks down, the operator does not have to stop the ion implantation equipment.
I can work.

[Brief explanation of drawings]

FIG. 1 is a side view showing an autoloader for an ion implantation device according to the present invention, and FIG. 2 is a side view showing a conventional autoloader for an ion implantation device. 1... Wafer cassette, 2... Wafer, 3... Motor, 4... Ball screw, 5... Belt, 6...
Ion implantation device, 7... autoloader, 8... wafer transfer section, 9... wafer lifter.

Claims (1)

[Claims] An autoloader for ion implantation equipment characterized by a combination of a wafer cassette raising and lowering function and a wafer transport section that places the wafer in the uppermost position.