JPS626640B2 - - Google Patents

Info

Publication number
JPS626640B2
JPS626640B2 JP57012648A JP1264882A JPS626640B2 JP S626640 B2 JPS626640 B2 JP S626640B2 JP 57012648 A JP57012648 A JP 57012648A JP 1264882 A JP1264882 A JP 1264882A JP S626640 B2 JPS626640 B2 JP S626640B2
Authority
JP
Japan
Prior art keywords
film thickness
substrate holder
correction plate
revolution
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57012648A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58131129A (ja
Inventor
Koyo Tsucha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP1264882A priority Critical patent/JPS58131129A/ja
Publication of JPS58131129A publication Critical patent/JPS58131129A/ja
Publication of JPS626640B2 publication Critical patent/JPS626640B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP1264882A 1982-01-29 1982-01-29 プラネタリ−式成膜装置における膜厚修正装置 Granted JPS58131129A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1264882A JPS58131129A (ja) 1982-01-29 1982-01-29 プラネタリ−式成膜装置における膜厚修正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1264882A JPS58131129A (ja) 1982-01-29 1982-01-29 プラネタリ−式成膜装置における膜厚修正装置

Publications (2)

Publication Number Publication Date
JPS58131129A JPS58131129A (ja) 1983-08-04
JPS626640B2 true JPS626640B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-02-12

Family

ID=11811182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1264882A Granted JPS58131129A (ja) 1982-01-29 1982-01-29 プラネタリ−式成膜装置における膜厚修正装置

Country Status (1)

Country Link
JP (1) JPS58131129A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003083162A1 (en) * 2002-03-28 2003-10-09 Satis Vacuum Industries S.P.A. Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates
CN103088298B (zh) * 2011-10-31 2016-05-11 鸿富锦精密工业（深圳）有限公司 镀膜修正板及镀膜装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5213511A (en) * 1975-07-22 1977-02-01 Kanebo Ltd Composite of alkaliiproof glass and alakliiproof glass fiber

Also Published As

Publication number Publication date
JPS58131129A (ja) 1983-08-04

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