JPS6262869U - - Google Patents

Info

Publication number
JPS6262869U
JPS6262869U JP15330985U JP15330985U JPS6262869U JP S6262869 U JPS6262869 U JP S6262869U JP 15330985 U JP15330985 U JP 15330985U JP 15330985 U JP15330985 U JP 15330985U JP S6262869 U JPS6262869 U JP S6262869U
Authority
JP
Japan
Prior art keywords
spinner
workpiece
flow path
coating device
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15330985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444217Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985153309U priority Critical patent/JPH0444217Y2/ja
Publication of JPS6262869U publication Critical patent/JPS6262869U/ja
Application granted granted Critical
Publication of JPH0444217Y2 publication Critical patent/JPH0444217Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1985153309U 1985-10-07 1985-10-07 Expired JPH0444217Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985153309U JPH0444217Y2 (de) 1985-10-07 1985-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985153309U JPH0444217Y2 (de) 1985-10-07 1985-10-07

Publications (2)

Publication Number Publication Date
JPS6262869U true JPS6262869U (de) 1987-04-18
JPH0444217Y2 JPH0444217Y2 (de) 1992-10-19

Family

ID=31072075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985153309U Expired JPH0444217Y2 (de) 1985-10-07 1985-10-07

Country Status (1)

Country Link
JP (1) JPH0444217Y2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636843A (ja) * 1986-06-26 1988-01-12 Dainippon Screen Mfg Co Ltd 基板現像処理方法
JPH03219445A (ja) * 1990-01-25 1991-09-26 Fuji Photo Film Co Ltd 光情報記録媒体の製造方法
US8551563B2 (en) 2008-05-13 2013-10-08 Tokyo Electron Limited Coating method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57201564A (en) * 1981-06-01 1982-12-10 Dainippon Printing Co Ltd Coating method
JPS6074775U (ja) * 1984-09-13 1985-05-25 大日本スクリーン製造株式会社 回転式表面処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57201564A (en) * 1981-06-01 1982-12-10 Dainippon Printing Co Ltd Coating method
JPS6074775U (ja) * 1984-09-13 1985-05-25 大日本スクリーン製造株式会社 回転式表面処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636843A (ja) * 1986-06-26 1988-01-12 Dainippon Screen Mfg Co Ltd 基板現像処理方法
JPH03219445A (ja) * 1990-01-25 1991-09-26 Fuji Photo Film Co Ltd 光情報記録媒体の製造方法
US8551563B2 (en) 2008-05-13 2013-10-08 Tokyo Electron Limited Coating method

Also Published As

Publication number Publication date
JPH0444217Y2 (de) 1992-10-19

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