JPS6262285B2 - - Google Patents
Info
- Publication number
- JPS6262285B2 JPS6262285B2 JP16716279A JP16716279A JPS6262285B2 JP S6262285 B2 JPS6262285 B2 JP S6262285B2 JP 16716279 A JP16716279 A JP 16716279A JP 16716279 A JP16716279 A JP 16716279A JP S6262285 B2 JPS6262285 B2 JP S6262285B2
- Authority
- JP
- Japan
- Prior art keywords
- relative humidity
- electrodes
- thermoelectromotive force
- semiconductor unit
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000005494 condensation Effects 0.000 description 11
- 238000009833 condensation Methods 0.000 description 11
- 238000001514 detection method Methods 0.000 description 6
- 229910002113 barium titanate Inorganic materials 0.000 description 3
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 3
- 229920000620 organic polymer Polymers 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16716279A JPS5689045A (en) | 1979-12-21 | 1979-12-21 | Relative humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16716279A JPS5689045A (en) | 1979-12-21 | 1979-12-21 | Relative humidity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5689045A JPS5689045A (en) | 1981-07-20 |
| JPS6262285B2 true JPS6262285B2 (fa) | 1987-12-25 |
Family
ID=15844560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16716279A Granted JPS5689045A (en) | 1979-12-21 | 1979-12-21 | Relative humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5689045A (fa) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60186742A (ja) * | 1984-03-05 | 1985-09-24 | Yoshio Shimizu | 湿度測定装置 |
-
1979
- 1979-12-21 JP JP16716279A patent/JPS5689045A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5689045A (en) | 1981-07-20 |
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