JPS626150B2 - - Google Patents

Info

Publication number
JPS626150B2
JPS626150B2 JP16500580A JP16500580A JPS626150B2 JP S626150 B2 JPS626150 B2 JP S626150B2 JP 16500580 A JP16500580 A JP 16500580A JP 16500580 A JP16500580 A JP 16500580A JP S626150 B2 JPS626150 B2 JP S626150B2
Authority
JP
Japan
Prior art keywords
valve
pressure
chamber
gas
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16500580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5790479A (en
Inventor
Tadashi Kojima
Tetsuo Uchihama
Kazuyoshi Tanaka
Eiichi Morozumi
Kentaro Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP16500580A priority Critical patent/JPS5790479A/ja
Priority to PCT/JP1981/000315 priority patent/WO1982001576A1/ja
Priority to EP19810902965 priority patent/EP0065011A4/en
Priority to AU78015/81A priority patent/AU7801581A/en
Publication of JPS5790479A publication Critical patent/JPS5790479A/ja
Priority to DK282382A priority patent/DK282382A/da
Publication of JPS626150B2 publication Critical patent/JPS626150B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
JP16500580A 1980-10-31 1980-11-21 Gas flow rate control apparatus Granted JPS5790479A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP16500580A JPS5790479A (en) 1980-11-21 1980-11-21 Gas flow rate control apparatus
PCT/JP1981/000315 WO1982001576A1 (en) 1980-10-31 1981-10-31 Pump driving valve device
EP19810902965 EP0065011A4 (en) 1980-10-31 1981-10-31 Pump driving valve device.
AU78015/81A AU7801581A (en) 1980-10-31 1981-10-31 Pump driving valve device
DK282382A DK282382A (da) 1980-10-31 1982-06-23 Pumpedrevet ventilanordning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16500580A JPS5790479A (en) 1980-11-21 1980-11-21 Gas flow rate control apparatus

Publications (2)

Publication Number Publication Date
JPS5790479A JPS5790479A (en) 1982-06-05
JPS626150B2 true JPS626150B2 (en, 2012) 1987-02-09

Family

ID=15804026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16500580A Granted JPS5790479A (en) 1980-10-31 1980-11-21 Gas flow rate control apparatus

Country Status (1)

Country Link
JP (1) JPS5790479A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0382645U (en, 2012) * 1989-12-11 1991-08-22
US10877446B2 (en) 2011-12-12 2020-12-29 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Switching between workpiece processing operating modes of a processing machine

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0677601U (ja) * 1992-05-06 1994-11-01 福原商事株式会社 柵兼用ベンチ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0382645U (en, 2012) * 1989-12-11 1991-08-22
US10877446B2 (en) 2011-12-12 2020-12-29 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Switching between workpiece processing operating modes of a processing machine

Also Published As

Publication number Publication date
JPS5790479A (en) 1982-06-05

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