JPS5790479A - Gas flow rate control apparatus - Google Patents

Gas flow rate control apparatus

Info

Publication number
JPS5790479A
JPS5790479A JP16500580A JP16500580A JPS5790479A JP S5790479 A JPS5790479 A JP S5790479A JP 16500580 A JP16500580 A JP 16500580A JP 16500580 A JP16500580 A JP 16500580A JP S5790479 A JPS5790479 A JP S5790479A
Authority
JP
Japan
Prior art keywords
valve
switch
flow rate
gas flow
control apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16500580A
Other languages
English (en)
Other versions
JPS626150B2 (ja
Inventor
Tadashi Kojima
Tetsuo Uchihama
Kazuyoshi Tanaka
Eiichi Morozumi
Kentaro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP16500580A priority Critical patent/JPS5790479A/ja
Priority to PCT/JP1981/000315 priority patent/WO1982001576A1/ja
Priority to EP19810902965 priority patent/EP0065011A4/en
Priority to AU78015/81A priority patent/AU7801581A/en
Publication of JPS5790479A publication Critical patent/JPS5790479A/ja
Priority to DK282382A priority patent/DK282382A/da
Publication of JPS626150B2 publication Critical patent/JPS626150B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
JP16500580A 1980-10-31 1980-11-21 Gas flow rate control apparatus Granted JPS5790479A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP16500580A JPS5790479A (en) 1980-11-21 1980-11-21 Gas flow rate control apparatus
PCT/JP1981/000315 WO1982001576A1 (en) 1980-10-31 1981-10-31 Pump driving valve device
EP19810902965 EP0065011A4 (en) 1980-10-31 1981-10-31 VALVE DEVICE DRIVEN BY A PUMP.
AU78015/81A AU7801581A (en) 1980-10-31 1981-10-31 Pump driving valve device
DK282382A DK282382A (da) 1980-10-31 1982-06-23 Pumpedrevet ventilanordning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16500580A JPS5790479A (en) 1980-11-21 1980-11-21 Gas flow rate control apparatus

Publications (2)

Publication Number Publication Date
JPS5790479A true JPS5790479A (en) 1982-06-05
JPS626150B2 JPS626150B2 (ja) 1987-02-09

Family

ID=15804026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16500580A Granted JPS5790479A (en) 1980-10-31 1980-11-21 Gas flow rate control apparatus

Country Status (1)

Country Link
JP (1) JPS5790479A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0677601U (ja) * 1992-05-06 1994-11-01 福原商事株式会社 柵兼用ベンチ

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0382645U (ja) * 1989-12-11 1991-08-22
DE102011088220A1 (de) 2011-12-12 2013-06-13 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zum Umschalten zwischen hinsichtlich der Bedienereingriffsanforderungen verschiedenen Betriebsmodi einer Bearbeitungsmaschine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0677601U (ja) * 1992-05-06 1994-11-01 福原商事株式会社 柵兼用ベンチ

Also Published As

Publication number Publication date
JPS626150B2 (ja) 1987-02-09

Similar Documents

Publication Publication Date Title
JPS5790479A (en) Gas flow rate control apparatus
ES484425A1 (es) Un dispositivo de control termosensible.
IE780651L (en) Device for controlling gas flow into vessels
JPS53444A (en) Gas supply control device
JPS53129788A (en) Control method for controlling flow rate or pressure by operating two or more valves
JPS52109656A (en) Control equipment for dryer
JPS5677636A (en) Automatic ventilating apparatus
JPS55123097A (en) Controller for preventing water hammering
JPS5663179A (en) Flow controller
JPS5390582A (en) Flow controller
JPS52112844A (en) Temperature control device
JPS5715155A (en) Valve configuration of proportional control valve for gas
JPS5623628A (en) Water flow detecting device in prior-stoppage-type instantaneous water heater
JPS5597575A (en) Safety device on gas supply passage
JPS5388201A (en) Fluid supply device
JPS534233A (en) Liquid fuel combustion system
JPS6484558A (en) Gas pressure controller for ion implantating device
JPS5441674A (en) Etching method
JPS5340135A (en) Carburetor
JPS5569380A (en) Gas flow controller
JPS537955A (en) Remote controller
JPS53107578A (en) Controller
JPS5786679A (en) Servo type proportional pressure control valve
JPS53104036A (en) Multistage operating choke valve device
JPS57120782A (en) Control valve