JPS5441674A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS5441674A JPS5441674A JP10771977A JP10771977A JPS5441674A JP S5441674 A JPS5441674 A JP S5441674A JP 10771977 A JP10771977 A JP 10771977A JP 10771977 A JP10771977 A JP 10771977A JP S5441674 A JPS5441674 A JP S5441674A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- etching method
- etching solution
- flowing
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To control the temperature of etching solution with low cost and in a short time, by flowing the gas controlling the temperature or flow rate or the both according to the temperature of the etching solution.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10771977A JPS5441674A (en) | 1977-09-09 | 1977-09-09 | Etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10771977A JPS5441674A (en) | 1977-09-09 | 1977-09-09 | Etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5441674A true JPS5441674A (en) | 1979-04-03 |
Family
ID=14466203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10771977A Pending JPS5441674A (en) | 1977-09-09 | 1977-09-09 | Etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5441674A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0160532U (en) * | 1987-10-13 | 1989-04-17 |
-
1977
- 1977-09-09 JP JP10771977A patent/JPS5441674A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0160532U (en) * | 1987-10-13 | 1989-04-17 |
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