JPS5441674A - Etching method - Google Patents

Etching method

Info

Publication number
JPS5441674A
JPS5441674A JP10771977A JP10771977A JPS5441674A JP S5441674 A JPS5441674 A JP S5441674A JP 10771977 A JP10771977 A JP 10771977A JP 10771977 A JP10771977 A JP 10771977A JP S5441674 A JPS5441674 A JP S5441674A
Authority
JP
Japan
Prior art keywords
temperature
etching method
etching solution
flowing
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10771977A
Other languages
Japanese (ja)
Inventor
Yasuhide Matsuda
Kunihiro Matsukuma
Masao Tsuruoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Power Semiconductor Device Ltd
Original Assignee
Hitachi Ltd
Hitachi Haramachi Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Haramachi Electronics Ltd filed Critical Hitachi Ltd
Priority to JP10771977A priority Critical patent/JPS5441674A/en
Publication of JPS5441674A publication Critical patent/JPS5441674A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To control the temperature of etching solution with low cost and in a short time, by flowing the gas controlling the temperature or flow rate or the both according to the temperature of the etching solution.
COPYRIGHT: (C)1979,JPO&Japio
JP10771977A 1977-09-09 1977-09-09 Etching method Pending JPS5441674A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10771977A JPS5441674A (en) 1977-09-09 1977-09-09 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10771977A JPS5441674A (en) 1977-09-09 1977-09-09 Etching method

Publications (1)

Publication Number Publication Date
JPS5441674A true JPS5441674A (en) 1979-04-03

Family

ID=14466203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10771977A Pending JPS5441674A (en) 1977-09-09 1977-09-09 Etching method

Country Status (1)

Country Link
JP (1) JPS5441674A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0160532U (en) * 1987-10-13 1989-04-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0160532U (en) * 1987-10-13 1989-04-17

Similar Documents

Publication Publication Date Title
JPS5325728A (en) Exhaust gas re-circulation control system
JPS5298804A (en) Turbine operation
JPS5433990A (en) Constant flow contorllor of batch system
JPS5441674A (en) Etching method
JPS53141832A (en) Fuel controlling apparatus
JPS53148752A (en) Flowing-fluid heating appartus
JPS5330060A (en) Flow rate control valve for refrigerator
JPS52118193A (en) Pressure controller for fluid
JPS5335888A (en) Flow control valve control system
JPS5431891A (en) Flow controller
JPS5356494A (en) Control rod drive mechanism
JPS5336706A (en) Jet pump flow-quantity controlling valve used for heating system
JPS53140486A (en) Pressure controlling method
JPS51114588A (en) Fluid flow control system
JPS52112844A (en) Temperature control device
JPS52134925A (en) Exhaust gas circulation means
JPS52134930A (en) Air flow rate regulator
JPS5356487A (en) Feed-forward type dam gate control system using integral value of forecast value of in-flow rate as datum of determination
JPS5419029A (en) Blow-bye gas flow rate control valve
JPS541438A (en) Vanadium system
JPS5336005A (en) Flow rate control method for pressure fluid and its device
JPS526883A (en) Control mechanism
JPS5360406A (en) Condenser exhaust gas control equipment
JPS5391442A (en) Gas water heater
JPS541096A (en) Control system for constant flow rate of gas