JPS541096A - Control system for constant flow rate of gas - Google Patents

Control system for constant flow rate of gas

Info

Publication number
JPS541096A
JPS541096A JP6478877A JP6478877A JPS541096A JP S541096 A JPS541096 A JP S541096A JP 6478877 A JP6478877 A JP 6478877A JP 6478877 A JP6478877 A JP 6478877A JP S541096 A JPS541096 A JP S541096A
Authority
JP
Japan
Prior art keywords
constant flow
flow rate
gas
control system
flow valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6478877A
Other languages
Japanese (ja)
Other versions
JPS5619904B2 (en
Inventor
Makoto Uematsu
Kazuo Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6478877A priority Critical patent/JPS541096A/en
Publication of JPS541096A publication Critical patent/JPS541096A/en
Publication of JPS5619904B2 publication Critical patent/JPS5619904B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To compensate flow rate change owing to the temperature of a constant flow valve and eliminate the need for containing the constant flow valve in a thermostatic bath by bypassing a gas line having the constant flow valve and line resistance to the atmosphere by a throttle device having the needle part of the same type as that of the constant flow valve.
COPYRIGHT: (C)1979,JPO&Japio
JP6478877A 1977-06-03 1977-06-03 Control system for constant flow rate of gas Granted JPS541096A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6478877A JPS541096A (en) 1977-06-03 1977-06-03 Control system for constant flow rate of gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6478877A JPS541096A (en) 1977-06-03 1977-06-03 Control system for constant flow rate of gas

Publications (2)

Publication Number Publication Date
JPS541096A true JPS541096A (en) 1979-01-06
JPS5619904B2 JPS5619904B2 (en) 1981-05-11

Family

ID=13268311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6478877A Granted JPS541096A (en) 1977-06-03 1977-06-03 Control system for constant flow rate of gas

Country Status (1)

Country Link
JP (1) JPS541096A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61199086A (en) * 1985-02-28 1986-09-03 Shinko Fuaudoraa Kk Method for circulating and treating acid solution for treating metallic surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61199086A (en) * 1985-02-28 1986-09-03 Shinko Fuaudoraa Kk Method for circulating and treating acid solution for treating metallic surface

Also Published As

Publication number Publication date
JPS5619904B2 (en) 1981-05-11

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