JPS626130Y2 - - Google Patents
Info
- Publication number
- JPS626130Y2 JPS626130Y2 JP17655382U JP17655382U JPS626130Y2 JP S626130 Y2 JPS626130 Y2 JP S626130Y2 JP 17655382 U JP17655382 U JP 17655382U JP 17655382 U JP17655382 U JP 17655382U JP S626130 Y2 JPS626130 Y2 JP S626130Y2
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- substrate holder
- vacuum container
- cylindrical substrate
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17655382U JPS5980464U (ja) | 1982-11-24 | 1982-11-24 | 蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17655382U JPS5980464U (ja) | 1982-11-24 | 1982-11-24 | 蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5980464U JPS5980464U (ja) | 1984-05-31 |
| JPS626130Y2 true JPS626130Y2 (cs) | 1987-02-12 |
Family
ID=30383821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17655382U Granted JPS5980464U (ja) | 1982-11-24 | 1982-11-24 | 蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5980464U (cs) |
-
1982
- 1982-11-24 JP JP17655382U patent/JPS5980464U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5980464U (ja) | 1984-05-31 |
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