JPS6260988A - リリ−フ弁装置 - Google Patents

リリ−フ弁装置

Info

Publication number
JPS6260988A
JPS6260988A JP20018185A JP20018185A JPS6260988A JP S6260988 A JPS6260988 A JP S6260988A JP 20018185 A JP20018185 A JP 20018185A JP 20018185 A JP20018185 A JP 20018185A JP S6260988 A JPS6260988 A JP S6260988A
Authority
JP
Japan
Prior art keywords
valve
relief valve
piston
cryopump
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20018185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0125903B2 (enrdf_load_stackoverflow
Inventor
Shinji Osako
信治 大迫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP20018185A priority Critical patent/JPS6260988A/ja
Publication of JPS6260988A publication Critical patent/JPS6260988A/ja
Publication of JPH0125903B2 publication Critical patent/JPH0125903B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Safety Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP20018185A 1985-09-10 1985-09-10 リリ−フ弁装置 Granted JPS6260988A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20018185A JPS6260988A (ja) 1985-09-10 1985-09-10 リリ−フ弁装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20018185A JPS6260988A (ja) 1985-09-10 1985-09-10 リリ−フ弁装置

Publications (2)

Publication Number Publication Date
JPS6260988A true JPS6260988A (ja) 1987-03-17
JPH0125903B2 JPH0125903B2 (enrdf_load_stackoverflow) 1989-05-19

Family

ID=16420140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20018185A Granted JPS6260988A (ja) 1985-09-10 1985-09-10 リリ−フ弁装置

Country Status (1)

Country Link
JP (1) JPS6260988A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014214773A (ja) * 2013-04-23 2014-11-17 株式会社モリタホールディングス 高速開放機構
CN108252893A (zh) * 2018-01-25 2018-07-06 乐清市乐翔电气有限公司 一种无气耗气体增压方法及系统

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014214773A (ja) * 2013-04-23 2014-11-17 株式会社モリタホールディングス 高速開放機構
CN108252893A (zh) * 2018-01-25 2018-07-06 乐清市乐翔电气有限公司 一种无气耗气体增压方法及系统
CN108252893B (zh) * 2018-01-25 2019-07-23 乐清市乐翔电气有限公司 一种无气耗气体增压系统

Also Published As

Publication number Publication date
JPH0125903B2 (enrdf_load_stackoverflow) 1989-05-19

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Legal Events

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EXPY Cancellation because of completion of term