JPS6257260U - - Google Patents
Info
- Publication number
- JPS6257260U JPS6257260U JP1985147140U JP14714085U JPS6257260U JP S6257260 U JPS6257260 U JP S6257260U JP 1985147140 U JP1985147140 U JP 1985147140U JP 14714085 U JP14714085 U JP 14714085U JP S6257260 U JPS6257260 U JP S6257260U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- pattern image
- protective plate
- gap
- close contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000005368 silicate glass Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 108010025899 gelatin film Proteins 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985147140U JPS6257260U (xx) | 1985-09-26 | 1985-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985147140U JPS6257260U (xx) | 1985-09-26 | 1985-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6257260U true JPS6257260U (xx) | 1987-04-09 |
Family
ID=31060231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985147140U Pending JPS6257260U (xx) | 1985-09-26 | 1985-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6257260U (xx) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121443A (en) * | 1979-03-14 | 1980-09-18 | Mitsubishi Electric Corp | Photomask base plate |
| JPS55121442A (en) * | 1979-03-14 | 1980-09-18 | Mitsubishi Electric Corp | Photomask base plate |
| JPS5629238A (en) * | 1979-08-15 | 1981-03-24 | Dainippon Printing Co Ltd | Photomask |
| JPS5670553A (en) * | 1979-11-14 | 1981-06-12 | Nec Corp | Photomask for projection exposure |
| JPS5687043A (en) * | 1979-12-19 | 1981-07-15 | Hitachi Ltd | Mask for exposure |
| JPS56130749A (en) * | 1980-03-18 | 1981-10-13 | Nec Corp | Photomask for projective exposure |
| JPS57119348A (en) * | 1981-01-17 | 1982-07-24 | Mitsubishi Electric Corp | Hard mask |
| JPS58100852A (ja) * | 1981-12-11 | 1983-06-15 | Hitachi Ltd | フオトマスク |
-
1985
- 1985-09-26 JP JP1985147140U patent/JPS6257260U/ja active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121443A (en) * | 1979-03-14 | 1980-09-18 | Mitsubishi Electric Corp | Photomask base plate |
| JPS55121442A (en) * | 1979-03-14 | 1980-09-18 | Mitsubishi Electric Corp | Photomask base plate |
| JPS5629238A (en) * | 1979-08-15 | 1981-03-24 | Dainippon Printing Co Ltd | Photomask |
| JPS5670553A (en) * | 1979-11-14 | 1981-06-12 | Nec Corp | Photomask for projection exposure |
| JPS5687043A (en) * | 1979-12-19 | 1981-07-15 | Hitachi Ltd | Mask for exposure |
| JPS56130749A (en) * | 1980-03-18 | 1981-10-13 | Nec Corp | Photomask for projective exposure |
| JPS57119348A (en) * | 1981-01-17 | 1982-07-24 | Mitsubishi Electric Corp | Hard mask |
| JPS58100852A (ja) * | 1981-12-11 | 1983-06-15 | Hitachi Ltd | フオトマスク |