JPS6257253B2 - - Google Patents

Info

Publication number
JPS6257253B2
JPS6257253B2 JP13161581A JP13161581A JPS6257253B2 JP S6257253 B2 JPS6257253 B2 JP S6257253B2 JP 13161581 A JP13161581 A JP 13161581A JP 13161581 A JP13161581 A JP 13161581A JP S6257253 B2 JPS6257253 B2 JP S6257253B2
Authority
JP
Japan
Prior art keywords
substrate
position detection
detection mark
mark
charged beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13161581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5833837A (ja
Inventor
Naoki Kato
Kuniki Oowada
Tadamasa Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13161581A priority Critical patent/JPS5833837A/ja
Publication of JPS5833837A publication Critical patent/JPS5833837A/ja
Publication of JPS6257253B2 publication Critical patent/JPS6257253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP13161581A 1981-08-24 1981-08-24 荷電ビ−ム用位置検出マ−クの構成方法 Granted JPS5833837A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13161581A JPS5833837A (ja) 1981-08-24 1981-08-24 荷電ビ−ム用位置検出マ−クの構成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13161581A JPS5833837A (ja) 1981-08-24 1981-08-24 荷電ビ−ム用位置検出マ−クの構成方法

Publications (2)

Publication Number Publication Date
JPS5833837A JPS5833837A (ja) 1983-02-28
JPS6257253B2 true JPS6257253B2 (OSRAM) 1987-11-30

Family

ID=15062199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13161581A Granted JPS5833837A (ja) 1981-08-24 1981-08-24 荷電ビ−ム用位置検出マ−クの構成方法

Country Status (1)

Country Link
JP (1) JPS5833837A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5948924A (ja) * 1982-09-14 1984-03-21 Nec Corp 電子線露光用位置合せマ−ク
JPS603400U (ja) * 1983-06-22 1985-01-11 富士工器株式会社 Ｌｐガス容器用キヤツプ

Also Published As

Publication number Publication date
JPS5833837A (ja) 1983-02-28

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