JPS6256604B2 - - Google Patents
Info
- Publication number
- JPS6256604B2 JPS6256604B2 JP1908781A JP1908781A JPS6256604B2 JP S6256604 B2 JPS6256604 B2 JP S6256604B2 JP 1908781 A JP1908781 A JP 1908781A JP 1908781 A JP1908781 A JP 1908781A JP S6256604 B2 JPS6256604 B2 JP S6256604B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating material
- diaphragm
- diffusion layer
- insulating
- implanted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011810 insulating material Substances 0.000 claims description 53
- 150000002500 ions Chemical class 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000005304 joining Methods 0.000 claims description 3
- 239000007943 implant Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 18
- 239000010410 layer Substances 0.000 description 17
- 239000012530 fluid Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Ceramic Products (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1908781A JPS57134805A (en) | 1981-02-13 | 1981-02-13 | Method of connecting insulating material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1908781A JPS57134805A (en) | 1981-02-13 | 1981-02-13 | Method of connecting insulating material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57134805A JPS57134805A (en) | 1982-08-20 |
| JPS6256604B2 true JPS6256604B2 (OSRAM) | 1987-11-26 |
Family
ID=11989666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1908781A Granted JPS57134805A (en) | 1981-02-13 | 1981-02-13 | Method of connecting insulating material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57134805A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2519393B2 (ja) * | 1993-11-22 | 1996-07-31 | 日産自動車株式会社 | 半導体力学量センサの製造方法 |
-
1981
- 1981-02-13 JP JP1908781A patent/JPS57134805A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57134805A (en) | 1982-08-20 |
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