JPS6255771B2 - - Google Patents

Info

Publication number
JPS6255771B2
JPS6255771B2 JP56086335A JP8633581A JPS6255771B2 JP S6255771 B2 JPS6255771 B2 JP S6255771B2 JP 56086335 A JP56086335 A JP 56086335A JP 8633581 A JP8633581 A JP 8633581A JP S6255771 B2 JPS6255771 B2 JP S6255771B2
Authority
JP
Japan
Prior art keywords
photocurable
exposure
unexposed
processing
developer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56086335A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5724940A (en
Inventor
Gurotsusa Mario
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of JPS5724940A publication Critical patent/JPS5724940A/ja
Publication of JPS6255771B2 publication Critical patent/JPS6255771B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
JP8633581A 1980-06-03 1981-06-03 Method of producing copying material Granted JPS5724940A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3020976A DE3020976C2 (de) 1980-06-03 1980-06-03 Verfahren zur Erhöhung der Verarbeitungsbreite von lichthärtbaren Aufzeichnungsmaterialien

Publications (2)

Publication Number Publication Date
JPS5724940A JPS5724940A (en) 1982-02-09
JPS6255771B2 true JPS6255771B2 (en:Method) 1987-11-20

Family

ID=6103829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8633581A Granted JPS5724940A (en) 1980-06-03 1981-06-03 Method of producing copying material

Country Status (6)

Country Link
US (1) US4361642A (en:Method)
JP (1) JPS5724940A (en:Method)
BE (1) BE889054A (en:Method)
DE (1) DE3020976C2 (en:Method)
FR (1) FR2483639A1 (en:Method)
GB (1) GB2081918B (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ZA872295B (en:Method) * 1986-03-13 1987-09-22
JPH03192718A (ja) * 1989-12-22 1991-08-22 Fujitsu Ltd 半導体装置の製造方法
EP0559934A1 (en) * 1992-03-11 1993-09-15 International Business Machines Corporation Method and apparatus for deep UV image reversal patterning

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2892712A (en) * 1954-04-23 1959-06-30 Du Pont Process for preparing relief images
US3415648A (en) * 1964-08-07 1968-12-10 Philco Ford Corp Pva etch masking process
US3597204A (en) * 1966-10-03 1971-08-03 Hughes Aircraft Co Method of providing induction photography and product
US3723120A (en) * 1971-08-30 1973-03-27 Du Pont Process for hardening photohardenable images
DE2861444D1 (en) * 1977-08-18 1982-02-11 Vickers Ltd Apparatus and method for the controlled processing of radiation sensitive devices in dependence upon the temperature of the developer liquid

Also Published As

Publication number Publication date
JPS5724940A (en) 1982-02-09
GB2081918A (en) 1982-02-24
BE889054A (fr) 1981-12-02
DE3020976C2 (de) 1983-01-27
US4361642A (en) 1982-11-30
FR2483639B1 (en:Method) 1982-11-26
GB2081918B (en) 1984-05-10
DE3020976A1 (de) 1981-12-10
FR2483639A1 (fr) 1981-12-04

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