JPS6255765B2 - - Google Patents

Info

Publication number
JPS6255765B2
JPS6255765B2 JP56134827A JP13482781A JPS6255765B2 JP S6255765 B2 JPS6255765 B2 JP S6255765B2 JP 56134827 A JP56134827 A JP 56134827A JP 13482781 A JP13482781 A JP 13482781A JP S6255765 B2 JPS6255765 B2 JP S6255765B2
Authority
JP
Japan
Prior art keywords
objective lens
curvature
prism
light
wollaston prism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56134827A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5837614A (ja
Inventor
Kenji Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP13482781A priority Critical patent/JPS5837614A/ja
Publication of JPS5837614A publication Critical patent/JPS5837614A/ja
Publication of JPS6255765B2 publication Critical patent/JPS6255765B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Microscoopes, Condenser (AREA)
JP13482781A 1981-08-29 1981-08-29 反射型微分干渉顕微鏡 Granted JPS5837614A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13482781A JPS5837614A (ja) 1981-08-29 1981-08-29 反射型微分干渉顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13482781A JPS5837614A (ja) 1981-08-29 1981-08-29 反射型微分干渉顕微鏡

Publications (2)

Publication Number Publication Date
JPS5837614A JPS5837614A (ja) 1983-03-04
JPS6255765B2 true JPS6255765B2 (enrdf_load_stackoverflow) 1987-11-20

Family

ID=15137392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13482781A Granted JPS5837614A (ja) 1981-08-29 1981-08-29 反射型微分干渉顕微鏡

Country Status (1)

Country Link
JP (1) JPS5837614A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH073329B2 (ja) * 1986-03-03 1995-01-18 ダイキン工業株式会社 三次元自由曲面測定装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB774277A (en) * 1952-05-14 1957-05-08 Centre Nat Rech Scient Interference polarizing device for study of phase objects

Also Published As

Publication number Publication date
JPS5837614A (ja) 1983-03-04

Similar Documents

Publication Publication Date Title
US5933236A (en) Phase shifting interferometer
US4515445A (en) Optical system for transmitted-light microscopy with incident illumination
US4255014A (en) Edge enhancement of phase phenomena
US2303906A (en) Polarized light compensating system
US3052152A (en) Optical compensating system
GB1415397A (en) Optical measuring device
US7046436B2 (en) Arrangement and method for polarization-optical interference contrast
US3495890A (en) Polarizing interferometer microscope
US4597650A (en) Specular microscope
US3202041A (en) Optical device for orienting monocrystals along the axis of the crystal
JPS6255765B2 (enrdf_load_stackoverflow)
US4492470A (en) Measuring microscope
US3454340A (en) Interferometry
US2049222A (en) Sight-testing apparatus
GB2055223A (en) Intermediate microscope imaging system
JPS6052371B2 (ja) 焦点位置測定装置
JPH0143042Y2 (enrdf_load_stackoverflow)
US6549334B1 (en) Transmission illumination type differential interference microscope
JPS6235446Y2 (enrdf_load_stackoverflow)
SU1580159A1 (ru) Измерительный микроскоп дл контрол качества оптических деталей и систем
US2694340A (en) Interference microscope
SU1104362A1 (ru) Интерферометр дл контрол качества оптических поверхностей
SU750273A1 (ru) Микроинтерферометр дл контрол шероховатости поверхностей
SU380946A1 (ru) Интерферометр для контроля качества плоской оптической поверхности детали
SU1530962A1 (ru) Устройство дл контрол центрировани оптических деталей