JPS5837614A - 反射型微分干渉顕微鏡 - Google Patents

反射型微分干渉顕微鏡

Info

Publication number
JPS5837614A
JPS5837614A JP13482781A JP13482781A JPS5837614A JP S5837614 A JPS5837614 A JP S5837614A JP 13482781 A JP13482781 A JP 13482781A JP 13482781 A JP13482781 A JP 13482781A JP S5837614 A JPS5837614 A JP S5837614A
Authority
JP
Japan
Prior art keywords
objective lens
differential interference
reflection type
curvature
prism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13482781A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255765B2 (enrdf_load_stackoverflow
Inventor
Kenji Yamada
健司 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP13482781A priority Critical patent/JPS5837614A/ja
Publication of JPS5837614A publication Critical patent/JPS5837614A/ja
Publication of JPS6255765B2 publication Critical patent/JPS6255765B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Microscoopes, Condenser (AREA)
JP13482781A 1981-08-29 1981-08-29 反射型微分干渉顕微鏡 Granted JPS5837614A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13482781A JPS5837614A (ja) 1981-08-29 1981-08-29 反射型微分干渉顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13482781A JPS5837614A (ja) 1981-08-29 1981-08-29 反射型微分干渉顕微鏡

Publications (2)

Publication Number Publication Date
JPS5837614A true JPS5837614A (ja) 1983-03-04
JPS6255765B2 JPS6255765B2 (enrdf_load_stackoverflow) 1987-11-20

Family

ID=15137392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13482781A Granted JPS5837614A (ja) 1981-08-29 1981-08-29 反射型微分干渉顕微鏡

Country Status (1)

Country Link
JP (1) JPS5837614A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62203005A (ja) * 1986-03-03 1987-09-07 Daikin Ind Ltd 三次元自由曲面測定装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB774277A (en) * 1952-05-14 1957-05-08 Centre Nat Rech Scient Interference polarizing device for study of phase objects

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB774277A (en) * 1952-05-14 1957-05-08 Centre Nat Rech Scient Interference polarizing device for study of phase objects

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62203005A (ja) * 1986-03-03 1987-09-07 Daikin Ind Ltd 三次元自由曲面測定装置

Also Published As

Publication number Publication date
JPS6255765B2 (enrdf_load_stackoverflow) 1987-11-20

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