JPS6255563U - - Google Patents
Info
- Publication number
- JPS6255563U JPS6255563U JP14619285U JP14619285U JPS6255563U JP S6255563 U JPS6255563 U JP S6255563U JP 14619285 U JP14619285 U JP 14619285U JP 14619285 U JP14619285 U JP 14619285U JP S6255563 U JPS6255563 U JP S6255563U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- discharge
- grid
- workpiece
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 238000000992 sputter etching Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14619285U JPS6255563U (enExample) | 1985-09-24 | 1985-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14619285U JPS6255563U (enExample) | 1985-09-24 | 1985-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6255563U true JPS6255563U (enExample) | 1987-04-06 |
Family
ID=31058435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14619285U Pending JPS6255563U (enExample) | 1985-09-24 | 1985-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255563U (enExample) |
-
1985
- 1985-09-24 JP JP14619285U patent/JPS6255563U/ja active Pending