JPS6255558U - - Google Patents
Info
- Publication number
- JPS6255558U JPS6255558U JP14607885U JP14607885U JPS6255558U JP S6255558 U JPS6255558 U JP S6255558U JP 14607885 U JP14607885 U JP 14607885U JP 14607885 U JP14607885 U JP 14607885U JP S6255558 U JPS6255558 U JP S6255558U
- Authority
- JP
- Japan
- Prior art keywords
- rotating roller
- locking piece
- rotating shaft
- rotating
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001771 vacuum deposition Methods 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985146078U JPH0329321Y2 (enExample) | 1985-09-24 | 1985-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985146078U JPH0329321Y2 (enExample) | 1985-09-24 | 1985-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6255558U true JPS6255558U (enExample) | 1987-04-06 |
| JPH0329321Y2 JPH0329321Y2 (enExample) | 1991-06-21 |
Family
ID=31058210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985146078U Expired JPH0329321Y2 (enExample) | 1985-09-24 | 1985-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0329321Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0187157U (enExample) * | 1987-11-26 | 1989-06-08 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54118945U (enExample) * | 1978-02-10 | 1979-08-20 | ||
| JPS57143474A (en) * | 1981-02-27 | 1982-09-04 | Hitachi Ltd | Revolving jig for vacuum vapor deposition device |
-
1985
- 1985-09-24 JP JP1985146078U patent/JPH0329321Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54118945U (enExample) * | 1978-02-10 | 1979-08-20 | ||
| JPS57143474A (en) * | 1981-02-27 | 1982-09-04 | Hitachi Ltd | Revolving jig for vacuum vapor deposition device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0187157U (enExample) * | 1987-11-26 | 1989-06-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0329321Y2 (enExample) | 1991-06-21 |