JPS6254239B2 - - Google Patents

Info

Publication number
JPS6254239B2
JPS6254239B2 JP56150298A JP15029881A JPS6254239B2 JP S6254239 B2 JPS6254239 B2 JP S6254239B2 JP 56150298 A JP56150298 A JP 56150298A JP 15029881 A JP15029881 A JP 15029881A JP S6254239 B2 JPS6254239 B2 JP S6254239B2
Authority
JP
Japan
Prior art keywords
quartz tube
heater element
heater
insulating film
vertical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56150298A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5851490A (ja
Inventor
Kunyoshi Idota
Haruo Matsura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Ecology Systems Co Ltd
Original Assignee
Matsushita Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Seiko Co Ltd filed Critical Matsushita Seiko Co Ltd
Priority to JP15029881A priority Critical patent/JPS5851490A/ja
Publication of JPS5851490A publication Critical patent/JPS5851490A/ja
Publication of JPS6254239B2 publication Critical patent/JPS6254239B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP15029881A 1981-09-22 1981-09-22 縦形石英管ヒ−タ Granted JPS5851490A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15029881A JPS5851490A (ja) 1981-09-22 1981-09-22 縦形石英管ヒ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15029881A JPS5851490A (ja) 1981-09-22 1981-09-22 縦形石英管ヒ−タ

Publications (2)

Publication Number Publication Date
JPS5851490A JPS5851490A (ja) 1983-03-26
JPS6254239B2 true JPS6254239B2 (enrdf_load_stackoverflow) 1987-11-13

Family

ID=15493940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15029881A Granted JPS5851490A (ja) 1981-09-22 1981-09-22 縦形石英管ヒ−タ

Country Status (1)

Country Link
JP (1) JPS5851490A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS419659Y1 (enrdf_load_stackoverflow) * 1964-03-04 1966-05-10

Also Published As

Publication number Publication date
JPS5851490A (ja) 1983-03-26

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