JPS6253190B2 - - Google Patents
Info
- Publication number
- JPS6253190B2 JPS6253190B2 JP14935884A JP14935884A JPS6253190B2 JP S6253190 B2 JPS6253190 B2 JP S6253190B2 JP 14935884 A JP14935884 A JP 14935884A JP 14935884 A JP14935884 A JP 14935884A JP S6253190 B2 JPS6253190 B2 JP S6253190B2
- Authority
- JP
- Japan
- Prior art keywords
- ultraviolet
- treated
- temperature
- gas
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000000356 contaminant Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 238000011282 treatment Methods 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 7
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims 2
- 239000001272 nitrous oxide Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 7
- 238000000354 decomposition reaction Methods 0.000 description 6
- 229910052736 halogen Inorganic materials 0.000 description 6
- 150000002367 halogens Chemical class 0.000 description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 6
- 229910052753 mercury Inorganic materials 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000002957 persistent organic pollutant Substances 0.000 description 2
- 235000002918 Fraxinus excelsior Nutrition 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002956 ash Substances 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Apparatus For Disinfection Or Sterilisation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14935884A JPS6129357A (ja) | 1984-07-20 | 1984-07-20 | 紫外線処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14935884A JPS6129357A (ja) | 1984-07-20 | 1984-07-20 | 紫外線処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6129357A JPS6129357A (ja) | 1986-02-10 |
| JPS6253190B2 true JPS6253190B2 (enrdf_load_stackoverflow) | 1987-11-09 |
Family
ID=15473381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14935884A Granted JPS6129357A (ja) | 1984-07-20 | 1984-07-20 | 紫外線処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6129357A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11285566B2 (en) | 2017-03-14 | 2022-03-29 | Honda Motor Co., Ltd. | Laser machining apparatus |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6501486B2 (ja) * | 2014-10-27 | 2019-04-17 | 学校法人東海大学 | 滅菌装置 |
| JP2018102635A (ja) * | 2016-12-27 | 2018-07-05 | 株式会社トクヤマ | 殺菌方法及び殺菌装置 |
-
1984
- 1984-07-20 JP JP14935884A patent/JPS6129357A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11285566B2 (en) | 2017-03-14 | 2022-03-29 | Honda Motor Co., Ltd. | Laser machining apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6129357A (ja) | 1986-02-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |