JPS6252460B2 - - Google Patents
Info
- Publication number
- JPS6252460B2 JPS6252460B2 JP54034986A JP3498679A JPS6252460B2 JP S6252460 B2 JPS6252460 B2 JP S6252460B2 JP 54034986 A JP54034986 A JP 54034986A JP 3498679 A JP3498679 A JP 3498679A JP S6252460 B2 JPS6252460 B2 JP S6252460B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- aluminum
- approximately
- chamber
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/12—Anodising more than once, e.g. in different baths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/892,943 US4146440A (en) | 1978-04-03 | 1978-04-03 | Method for forming an aluminum interconnect structure on an integrated circuit chip |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54132169A JPS54132169A (en) | 1979-10-13 |
| JPS6252460B2 true JPS6252460B2 (enExample) | 1987-11-05 |
Family
ID=25400751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3498679A Granted JPS54132169A (en) | 1978-04-03 | 1979-03-20 | Method of forming mutual connecting structure of aluminum on ic chip |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4146440A (enExample) |
| JP (1) | JPS54132169A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4358339A (en) * | 1978-07-27 | 1982-11-09 | Rockwell International Corporation | Method of fabrication of bubble domain device structures |
| US4456506A (en) * | 1982-01-28 | 1984-06-26 | Sperry Corporation | Superconducting circuit fabrication |
| US5679982A (en) * | 1993-02-24 | 1997-10-21 | Intel Corporation | Barrier against metal diffusion |
| US6387771B1 (en) * | 1999-06-08 | 2002-05-14 | Infineon Technologies Ag | Low temperature oxidation of conductive layers for semiconductor fabrication |
| US6899815B2 (en) * | 2002-03-29 | 2005-05-31 | Intel Corporation | Multi-layer integrated circuit package |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3827949A (en) * | 1972-03-29 | 1974-08-06 | Ibm | Anodic oxide passivated planar aluminum metallurgy system and method of producing |
| JPS5722885B2 (enExample) * | 1974-02-18 | 1982-05-15 | ||
| JPS5731315B2 (enExample) * | 1974-05-13 | 1982-07-03 | ||
| US4045302A (en) * | 1976-07-08 | 1977-08-30 | Burroughs Corporation | Multilevel metallization process |
-
1978
- 1978-04-03 US US05/892,943 patent/US4146440A/en not_active Expired - Lifetime
-
1979
- 1979-03-20 JP JP3498679A patent/JPS54132169A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54132169A (en) | 1979-10-13 |
| US4146440A (en) | 1979-03-27 |
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