JPS6252205B2 - - Google Patents

Info

Publication number
JPS6252205B2
JPS6252205B2 JP26068884A JP26068884A JPS6252205B2 JP S6252205 B2 JPS6252205 B2 JP S6252205B2 JP 26068884 A JP26068884 A JP 26068884A JP 26068884 A JP26068884 A JP 26068884A JP S6252205 B2 JPS6252205 B2 JP S6252205B2
Authority
JP
Japan
Prior art keywords
secondary air
distribution pipe
mixed gas
tube
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP26068884A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61140711A (ja
Inventor
Tomizo Kagomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kitazawa Sangyo Co Ltd
Original Assignee
Kitazawa Sangyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kitazawa Sangyo Co Ltd filed Critical Kitazawa Sangyo Co Ltd
Priority to JP26068884A priority Critical patent/JPS61140711A/ja
Publication of JPS61140711A publication Critical patent/JPS61140711A/ja
Publication of JPS6252205B2 publication Critical patent/JPS6252205B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gas Burners (AREA)
JP26068884A 1984-12-12 1984-12-12 伝熱管付マルチホ−ルバ−ナ Granted JPS61140711A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26068884A JPS61140711A (ja) 1984-12-12 1984-12-12 伝熱管付マルチホ−ルバ−ナ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26068884A JPS61140711A (ja) 1984-12-12 1984-12-12 伝熱管付マルチホ−ルバ−ナ

Publications (2)

Publication Number Publication Date
JPS61140711A JPS61140711A (ja) 1986-06-27
JPS6252205B2 true JPS6252205B2 (ru) 1987-11-04

Family

ID=17351390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26068884A Granted JPS61140711A (ja) 1984-12-12 1984-12-12 伝熱管付マルチホ−ルバ−ナ

Country Status (1)

Country Link
JP (1) JPS61140711A (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1105398C (zh) * 1997-03-21 2003-04-09 精工爱普生株式会社 半导体装置的制造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614724U (ja) * 1992-07-21 1994-02-25 パーカー熱処理工業株式会社 シングルエンドバーナー
JP2013185791A (ja) * 2012-03-09 2013-09-19 Osaka Gas Co Ltd ラジアントチューブ式加熱装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1105398C (zh) * 1997-03-21 2003-04-09 精工爱普生株式会社 半导体装置的制造方法

Also Published As

Publication number Publication date
JPS61140711A (ja) 1986-06-27

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