JPS6251647U - - Google Patents

Info

Publication number
JPS6251647U
JPS6251647U JP14401485U JP14401485U JPS6251647U JP S6251647 U JPS6251647 U JP S6251647U JP 14401485 U JP14401485 U JP 14401485U JP 14401485 U JP14401485 U JP 14401485U JP S6251647 U JPS6251647 U JP S6251647U
Authority
JP
Japan
Prior art keywords
piezoelectric actuator
rays
anode target
window
cathode filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14401485U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14401485U priority Critical patent/JPS6251647U/ja
Publication of JPS6251647U publication Critical patent/JPS6251647U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • X-Ray Techniques (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の縦断面図。第２図
は上記実施例の作動説明図。第３図は従来例装置
の縦断面図。 １……キヤビネツト、２……Ｘ線発生器、３…
…フイラメント、４……圧電アクチユエータ、４
Ａ……基部、５……ターゲツト、５Ａ……ターゲ
ツトの回転軸、６……窓、７……Ｘ線発生電源、
８……圧電アクチユエータ伸縮制御盤、９……シ
ヤツタ部、１０……試料台、１１……被観察物、
１２……試料回転モータ、１３……試料駆動制御
盤、１４……テレビジヨンカメラ、１５……テレ
ビジヨンモータ。

Claims (1)

  1. 【実用新案登録請求の範囲】 陰極フイラメントと、 この陰極フイラメントが放射する電子ビームを
    受けてＸ線を発生する陽極ターゲツトと を備えたＸ線発生器において、 上記陽極ターゲツトに圧電アクチユエータが接
    続され、 上記陽極ターゲツトから発生したＸ線が通過す
    る窓を備え、 上記圧電アクチユエータは外部電気信号により
    Ｘ線の放射角が上記窓の幅より大きくなるように
    変化させる構造であることを特徴とする Ｘ線発生器。
JP14401485U 1985-09-20 1985-09-20 Pending JPS6251647U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14401485U JPS6251647U (ja) 1985-09-20 1985-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14401485U JPS6251647U (ja) 1985-09-20 1985-09-20

Publications (1)

Publication Number Publication Date
JPS6251647U true JPS6251647U (ja) 1987-03-31

Family

ID=31054232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14401485U Pending JPS6251647U (ja) 1985-09-20 1985-09-20

Country Status (1)

Country Link
JP (1) JPS6251647U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012054045A (ja) * 2010-08-31 2012-03-15 Hamamatsu Photonics Kk Ｘ線照射装置
EP3016482A1 (en) * 2014-10-27 2016-05-04 Hitachi High-Tech Science Corporation X-ray generator and fluorescent x-ray analyzer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012054045A (ja) * 2010-08-31 2012-03-15 Hamamatsu Photonics Kk Ｘ線照射装置
EP3016482A1 (en) * 2014-10-27 2016-05-04 Hitachi High-Tech Science Corporation X-ray generator and fluorescent x-ray analyzer
CN105548228A (zh) * 2014-10-27 2016-05-04 日本株式会社日立高新技术科学 X射线产生源和荧光x射线分析装置

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