JPS6250989B2 - - Google Patents
Info
- Publication number
- JPS6250989B2 JPS6250989B2 JP17101279A JP17101279A JPS6250989B2 JP S6250989 B2 JPS6250989 B2 JP S6250989B2 JP 17101279 A JP17101279 A JP 17101279A JP 17101279 A JP17101279 A JP 17101279A JP S6250989 B2 JPS6250989 B2 JP S6250989B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- substrate
- ion
- ion implantation
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
Landscapes
- Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17101279A JPS5694772A (en) | 1979-12-28 | 1979-12-28 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17101279A JPS5694772A (en) | 1979-12-28 | 1979-12-28 | Manufacturing method of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5694772A JPS5694772A (en) | 1981-07-31 |
| JPS6250989B2 true JPS6250989B2 (enrdf_load_stackoverflow) | 1987-10-28 |
Family
ID=15915453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17101279A Granted JPS5694772A (en) | 1979-12-28 | 1979-12-28 | Manufacturing method of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5694772A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01173757A (ja) * | 1987-12-28 | 1989-07-10 | Fujitsu Ltd | Ｍｉｓ型半導体装置の製造方法 |
-
1979
- 1979-12-28 JP JP17101279A patent/JPS5694772A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5694772A (en) | 1981-07-31 |
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