JPS62501286A - 超高純度重金属フッ化物の製造方法 - Google Patents
超高純度重金属フッ化物の製造方法Info
- Publication number
- JPS62501286A JPS62501286A JP60504598A JP50459885A JPS62501286A JP S62501286 A JPS62501286 A JP S62501286A JP 60504598 A JP60504598 A JP 60504598A JP 50459885 A JP50459885 A JP 50459885A JP S62501286 A JPS62501286 A JP S62501286A
- Authority
- JP
- Japan
- Prior art keywords
- reaction mixture
- gas
- fluoride
- active metal
- active
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 229910001385 heavy metal Inorganic materials 0.000 title description 11
- 239000007789 gas Substances 0.000 claims description 44
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 36
- 229910001868 water Inorganic materials 0.000 claims description 35
- 238000006243 chemical reaction Methods 0.000 claims description 34
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 33
- 229910001512 metal fluoride Inorganic materials 0.000 claims description 32
- MZQZQKZKTGRQCG-UHFFFAOYSA-J thorium tetrafluoride Chemical compound F[Th](F)(F)F MZQZQKZKTGRQCG-UHFFFAOYSA-J 0.000 claims description 25
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 claims description 22
- 239000011541 reaction mixture Substances 0.000 claims description 21
- 239000000047 product Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 18
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 17
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims description 15
- 239000001569 carbon dioxide Substances 0.000 claims description 14
- 239000012159 carrier gas Substances 0.000 claims description 13
- -1 halide compound Chemical class 0.000 claims description 9
- 150000001450 anions Chemical class 0.000 claims description 8
- 150000002222 fluorine compounds Chemical class 0.000 claims description 8
- XWCDCDSDNJVCLO-UHFFFAOYSA-N Chlorofluoromethane Chemical class FCCl XWCDCDSDNJVCLO-UHFFFAOYSA-N 0.000 claims description 7
- 239000007795 chemical reaction product Substances 0.000 claims description 7
- 229910044991 metal oxide Inorganic materials 0.000 claims description 7
- 150000004706 metal oxides Chemical class 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 claims description 6
- 239000004338 Dichlorodifluoromethane Substances 0.000 claims description 5
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical group FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 claims description 5
- 235000019404 dichlorodifluoromethane Nutrition 0.000 claims description 5
- 229910052736 halogen Inorganic materials 0.000 claims description 5
- 150000002367 halogens Chemical class 0.000 claims description 5
- 229910003452 thorium oxide Inorganic materials 0.000 claims description 5
- 150000001721 carbon Chemical class 0.000 claims description 4
- 229910052776 Thorium Inorganic materials 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 229910009112 xH2O Inorganic materials 0.000 claims description 3
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 241000234282 Allium Species 0.000 claims 1
- 235000002732 Allium cepa var. cepa Nutrition 0.000 claims 1
- OMRRUNXAWXNVFW-UHFFFAOYSA-N fluoridochlorine Chemical compound ClF OMRRUNXAWXNVFW-UHFFFAOYSA-N 0.000 claims 1
- NBVXSUQYWXRMNV-OUBTZVSYSA-N fluoromethane Chemical class F[13CH3] NBVXSUQYWXRMNV-OUBTZVSYSA-N 0.000 claims 1
- 229910003439 heavy metal oxide Inorganic materials 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 description 25
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 10
- 125000000129 anionic group Chemical group 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 7
- 229910001507 metal halide Inorganic materials 0.000 description 7
- 150000005309 metal halides Chemical class 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 239000012071 phase Substances 0.000 description 6
- 238000011109 contamination Methods 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000000376 reactant Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000012808 vapor phase Substances 0.000 description 4
- 101100536577 Caenorhabditis elegans cct-4 gene Proteins 0.000 description 3
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 3
- 150000002343 gold Chemical class 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 150000004820 halides Chemical class 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- YGYAWVDWMABLBF-UHFFFAOYSA-N Phosgene Chemical compound ClC(Cl)=O YGYAWVDWMABLBF-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 101150027026 cct4 gene Proteins 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- 125000005843 halogen group Chemical group 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 239000008267 milk Substances 0.000 description 2
- 210000004080 milk Anatomy 0.000 description 2
- 235000013336 milk Nutrition 0.000 description 2
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- HJUGFYREWKUQJT-UHFFFAOYSA-N tetrabromomethane Chemical compound BrC(Br)(Br)Br HJUGFYREWKUQJT-UHFFFAOYSA-N 0.000 description 2
- 238000001757 thermogravimetry curve Methods 0.000 description 2
- ZQXCQTAELHSNAT-UHFFFAOYSA-N 1-chloro-3-nitro-5-(trifluoromethyl)benzene Chemical compound [O-][N+](=O)C1=CC(Cl)=CC(C(F)(F)F)=C1 ZQXCQTAELHSNAT-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241001062872 Cleyera japonica Species 0.000 description 1
- 244000241257 Cucumis melo Species 0.000 description 1
- 235000015510 Cucumis melo subsp melo Nutrition 0.000 description 1
- 101100328843 Dictyostelium discoideum cofB gene Proteins 0.000 description 1
- 241000257465 Echinoidea Species 0.000 description 1
- WMFYOYKPJLRMJI-UHFFFAOYSA-N Lercanidipine hydrochloride Chemical class Cl.COC(=O)C1=C(C)NC(C)=C(C(=O)OC(C)(C)CN(C)CCC(C=2C=CC=CC=2)C=2C=CC=CC=2)C1C1=CC=CC([N+]([O-])=O)=C1 WMFYOYKPJLRMJI-UHFFFAOYSA-N 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- QGUFQHIQPMATJB-UHFFFAOYSA-J O.[F-].[Th+4].[F-].[F-].[F-] Chemical compound O.[F-].[Th+4].[F-].[F-].[F-] QGUFQHIQPMATJB-UHFFFAOYSA-J 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- 241001014642 Rasta Species 0.000 description 1
- 229920001800 Shellac Polymers 0.000 description 1
- 229910004369 ThO2 Inorganic materials 0.000 description 1
- 241001061127 Thione Species 0.000 description 1
- FJJCIZWZNKZHII-UHFFFAOYSA-N [4,6-bis(cyanoamino)-1,3,5-triazin-2-yl]cyanamide Chemical compound N#CNC1=NC(NC#N)=NC(NC#N)=N1 FJJCIZWZNKZHII-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 150000001447 alkali salts Chemical class 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 150000001649 bromium compounds Chemical class 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- IYRWEQXVUNLMAY-UHFFFAOYSA-N carbonyl fluoride Chemical compound FC(F)=O IYRWEQXVUNLMAY-UHFFFAOYSA-N 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- AFYPFACVUDMOHA-UHFFFAOYSA-N chlorotrifluoromethane Chemical compound FC(F)(F)Cl AFYPFACVUDMOHA-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000003963 dichloro group Chemical group Cl* 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 230000000855 fungicidal effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000029052 metamorphosis Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 235000021110 pickles Nutrition 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000013014 purified material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 239000004208 shellac Substances 0.000 description 1
- ZLGIYFNHBLSMPS-ATJNOEHPSA-N shellac Chemical compound OCCCCCC(O)C(O)CCCCCCCC(O)=O.C1C23[C@H](C(O)=O)CCC2[C@](C)(CO)[C@@H]1C(C(O)=O)=C[C@@H]3O ZLGIYFNHBLSMPS-ATJNOEHPSA-N 0.000 description 1
- 229940113147 shellac Drugs 0.000 description 1
- 235000013874 shellac Nutrition 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- WEQHQGJDZLDFID-UHFFFAOYSA-J thorium(iv) chloride Chemical compound Cl[Th](Cl)(Cl)Cl WEQHQGJDZLDFID-UHFFFAOYSA-J 0.000 description 1
- CYRMSUTZVYGINF-UHFFFAOYSA-N trichlorofluoromethane Chemical compound FC(Cl)(Cl)Cl CYRMSUTZVYGINF-UHFFFAOYSA-N 0.000 description 1
- 229940029284 trichlorofluoromethane Drugs 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G27/00—Compounds of hafnium
- C01G27/04—Halides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B9/00—General methods of preparing halides
- C01B9/08—Fluorides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F15/00—Compounds of thorium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F17/00—Compounds of rare earth metals
- C01F17/20—Compounds containing only rare earth metals as the metal element
- C01F17/253—Halides
- C01F17/265—Fluorides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G25/00—Compounds of zirconium
- C01G25/04—Halides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/80—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70
- C01P2002/88—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70 by thermal analysis data, e.g. TGA, DTA, DSC
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/686,774 US4752454A (en) | 1984-12-27 | 1984-12-27 | Process for the preparation of ultrapure active metal fluorides |
| US686774 | 1991-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62501286A true JPS62501286A (ja) | 1987-05-21 |
| JPH022808B2 JPH022808B2 (enExample) | 1990-01-19 |
Family
ID=24757696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60504598A Granted JPS62501286A (ja) | 1984-12-27 | 1985-09-26 | 超高純度重金属フッ化物の製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4752454A (enExample) |
| EP (1) | EP0205454B1 (enExample) |
| JP (1) | JPS62501286A (enExample) |
| DE (1) | DE3572154D1 (enExample) |
| WO (1) | WO1986004048A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009114055A (ja) * | 2007-11-02 | 2009-05-28 | Ryusei:Kk | フッ化ガスの分離及び精製回収方法 |
| JP5532435B2 (ja) * | 2008-05-16 | 2014-06-25 | 株式会社トクヤマ | 前処理金属フッ化物およびフッ化物結晶の製造方法 |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1986004049A1 (en) * | 1984-12-27 | 1986-07-17 | Hughes Aircraft Company | Process for the preparation of ultrapure heavy metal fluorides |
| US5069701A (en) * | 1987-07-13 | 1991-12-03 | Hughes Aircraft Company | Preparation of fluoride glass by chemical vapor deposition |
| DE58903259D1 (de) * | 1988-05-20 | 1993-02-25 | Siemens Ag | Verfahren zur herstellung einer optischen faser hoher festigkeit. |
| US5200098A (en) * | 1988-10-12 | 1993-04-06 | Union Oil Company Of California | Cerium-containing lubricating compositions |
| US5091168A (en) * | 1990-08-15 | 1992-02-25 | E. I. Du Pont De Nemours And Company | Preparation of anhydrous niobium and tantalum pentafluorides |
| US5756369A (en) * | 1996-07-11 | 1998-05-26 | Lsi Logic Corporation | Rapid thermal processing using a narrowband infrared source and feedback |
| CA2430608C (en) * | 2002-06-03 | 2012-01-10 | Praxair Technology, Inc. | Carbon dioxide laser resonator gas |
| US20060115980A1 (en) * | 2004-11-30 | 2006-06-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for decreasing a dielectric constant of a low-k film |
| US20110101273A1 (en) * | 2005-09-16 | 2011-05-05 | Robert Rewick | Process and Composition for Making Rare Earth Doped Particles and Methods of Using Them |
| US12103860B2 (en) * | 2017-02-03 | 2024-10-01 | The South African Nuclear Energy Corporation Soc Limited | Preparation process for rare earth metal fluorides |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58140306A (ja) * | 1982-01-28 | 1983-08-20 | ヒユーズ・エアクラフト・カンパニー | 超高純度重金属フツ化物の製造方法、超高純度フツ化トリウム、および光学部品 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR496258A (fr) * | 1919-02-26 | 1919-10-31 | William Heap | Perfectionnements apportés à la fabrication de chlorures métalliques |
| US2397929A (en) * | 1942-12-30 | 1946-04-09 | Rca Corp | Reduction in reflection from glass |
| US2893825A (en) * | 1951-04-11 | 1959-07-07 | John G Malm | Separation of protactinium from contaminants |
| US2972513A (en) * | 1956-01-13 | 1961-02-21 | Atomenergi Ab | Process for the production of anhydrous fluorides |
| US2991149A (en) * | 1957-10-04 | 1961-07-04 | Dow Chemical Co | Method of dehydrating hydrates of thorium fluoride |
| DE1244143B (de) * | 1964-11-21 | 1967-07-13 | Kernforschungsanlage Juelich D | Verfahren zur Aufbereitung uranhaltiger Kernbrennstoffe |
| US3460918A (en) * | 1968-01-12 | 1969-08-12 | Atomic Energy Commission | Method of chlorinating metals with carbon tetrachloride and carbon dioxide |
| US3748095A (en) * | 1968-06-17 | 1973-07-24 | Mc Donnell Douglas Corp | Production of high purity rare earth sulfides |
| US4013796A (en) * | 1973-08-27 | 1977-03-22 | The Harshaw Chemical Company | Hot-pressed ionic fluoride optical bodies free of absorption bands and method of making them |
| US4341873A (en) * | 1980-03-19 | 1982-07-27 | Hughes Aircraft Company | Fluorozirconate, glass and the process for making the same |
-
1984
- 1984-12-27 US US06/686,774 patent/US4752454A/en not_active Expired - Lifetime
-
1985
- 1985-09-26 DE DE8585905141T patent/DE3572154D1/de not_active Expired
- 1985-09-26 EP EP85905141A patent/EP0205454B1/en not_active Expired
- 1985-09-26 WO PCT/US1985/001834 patent/WO1986004048A1/en not_active Ceased
- 1985-09-26 JP JP60504598A patent/JPS62501286A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58140306A (ja) * | 1982-01-28 | 1983-08-20 | ヒユーズ・エアクラフト・カンパニー | 超高純度重金属フツ化物の製造方法、超高純度フツ化トリウム、および光学部品 |
| US4519986A (en) * | 1982-01-28 | 1985-05-28 | Hughes Aircraft Company | Process for preparation of ultrapure thorium fluoride |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009114055A (ja) * | 2007-11-02 | 2009-05-28 | Ryusei:Kk | フッ化ガスの分離及び精製回収方法 |
| JP5532435B2 (ja) * | 2008-05-16 | 2014-06-25 | 株式会社トクヤマ | 前処理金属フッ化物およびフッ化物結晶の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0205454B1 (en) | 1989-08-09 |
| US4752454A (en) | 1988-06-21 |
| WO1986004048A1 (en) | 1986-07-17 |
| JPH022808B2 (enExample) | 1990-01-19 |
| EP0205454A1 (en) | 1986-12-30 |
| DE3572154D1 (en) | 1989-09-14 |
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