JPS6249928B2 - - Google Patents

Info

Publication number
JPS6249928B2
JPS6249928B2 JP16182980A JP16182980A JPS6249928B2 JP S6249928 B2 JPS6249928 B2 JP S6249928B2 JP 16182980 A JP16182980 A JP 16182980A JP 16182980 A JP16182980 A JP 16182980A JP S6249928 B2 JPS6249928 B2 JP S6249928B2
Authority
JP
Japan
Prior art keywords
radiation
target
sensing element
area
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16182980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5788350A (en
Inventor
Urajimiroitsuchi Arekusandoru Yuurii
Domitorieuitsuchi Bikutorofu Bikutooru
Kuzumichi Zuefu Urajimiiru
Sutepanoitsuchi Orurofu Gennadeii
Andoreeeuitsuchi Fuiripin Nikorai
Sutepanoitsuchi Fun Fuyoodoru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RENIN NAUCHINOOPUROIZUBODOSUTOBENNOE OBIEDEINENIE TECH OBORUDOWANIA DORYA PUROIZUBODOSUTOWA GOTOBUIFU REKARUSUTOBENNUIFU SUREDOSUTO
Original Assignee
RENIN NAUCHINOOPUROIZUBODOSUTOBENNOE OBIEDEINENIE TECH OBORUDOWANIA DORYA PUROIZUBODOSUTOWA GOTOBUIFU REKARUSUTOBENNUIFU SUREDOSUTO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RENIN NAUCHINOOPUROIZUBODOSUTOBENNOE OBIEDEINENIE TECH OBORUDOWANIA DORYA PUROIZUBODOSUTOWA GOTOBUIFU REKARUSUTOBENNUIFU SUREDOSUTO filed Critical RENIN NAUCHINOOPUROIZUBODOSUTOBENNOE OBIEDEINENIE TECH OBORUDOWANIA DORYA PUROIZUBODOSUTOWA GOTOBUIFU REKARUSUTOBENNUIFU SUREDOSUTO
Priority to JP16182980A priority Critical patent/JPS5788350A/ja
Publication of JPS5788350A publication Critical patent/JPS5788350A/ja
Publication of JPS6249928B2 publication Critical patent/JPS6249928B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP16182980A 1980-11-17 1980-11-17 Foreign particle detector Granted JPS5788350A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16182980A JPS5788350A (en) 1980-11-17 1980-11-17 Foreign particle detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16182980A JPS5788350A (en) 1980-11-17 1980-11-17 Foreign particle detector

Publications (2)

Publication Number Publication Date
JPS5788350A JPS5788350A (en) 1982-06-02
JPS6249928B2 true JPS6249928B2 (enExample) 1987-10-22

Family

ID=15742700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16182980A Granted JPS5788350A (en) 1980-11-17 1980-11-17 Foreign particle detector

Country Status (1)

Country Link
JP (1) JPS5788350A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005283527A (ja) * 2004-03-31 2005-10-13 Hitachi High-Technologies Corp 異物検出装置

Also Published As

Publication number Publication date
JPS5788350A (en) 1982-06-02

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